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DTSTAMP:20210120T053553Z
UID:ED19FB1B-8F54-4921-A781-916EBAE91D62
DTSTART;TZID=Europe/Zurich:20200221T083000
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DESCRIPTION:Magnetically levitated planar motors are the best candidates of
  the electromagnetic motion systems for wafer scanners in the lithographic
  industry because of their clean-room and vacuum compatibility. Using the 
 magnetic fields for bearingless motion concepts\, they have to be controll
 ed actively in six degrees-of-freedom for stable operation. Therefore\, al
 l force and torque components acting on the translator should be accessibl
 e and be decoupled. Typically\, they provide the long stroke xy-movements\
 , a short stroke along the z-axis\, and small rotations around all axes. H
 igh-precision bearingless planar motors with magnetic levitation and sub-m
 icrometer accuracy are usually of PM synchronous type. In contrast to thes
 e levitated planar motors\, a novel enabling magnetic suspension system un
 derneath a stationary frame – elevated propulsion stage is developed. It
  requires an attractive normal force between the frame and the translator 
 to counteract the gravitational force\, whereas magnetic levitation above 
 a stationary frame is based on a repulsive normal force. In this respect\,
  basically many topologies (synchronous PM\, induction\, reluctance ones) 
 are applicable. Several possible topologies for both concepts of bearingle
 ss magnetically levitated and suspended systems are treated\, a thorough e
 lectromagnetic analysis\, and several design and performance criteria are 
 discussed. The decoupling techniques for force and torque components are d
 emonstrated with the aim to realize an active magnetic bearing principle. 
 Additionally\, the symmetrical propulsion behavior along x and y axes\, an
 d wireless energy transfer from the stationary platform to the moving plat
 form are demonstrated. All theoretical findings are verified with experime
 nts of fully operational magnetically levitated and suspended stages.\n\nS
 peaker(s): Prof. Elena Lomonova\, \n\nRoom: H23\, Bldg: ETL \, ETH Zurich 
 - Physikstrasse 3\, Zurich\, Switzerland\, Switzerland\, CH-8092\, Virtual
 : https://events.vtools.ieee.org/m/257568
LOCATION:Room: H23\, Bldg: ETL \, ETH Zurich - Physikstrasse 3\, Zurich\, S
 witzerland\, Switzerland\, CH-8092\, Virtual: https://events.vtools.ieee.o
 rg/m/257568
ORGANIZER:drazen.dujic@ieee.org
SEQUENCE:0
SUMMARY:Electromagnetic Propulsion\, Suspension and Levitation – New Conc
 epts of Bearingless Systems for High-Precision Industry
URL;VALUE=URI:https://events.vtools.ieee.org/m/257568
X-ALT-DESC:Description: <br /><p><span class="Apple-converted-space">&nbsp\
 ;</span>Magnetically levitated planar motors are the best candidates of th
 e electromagnetic motion systems for wafer scanners in the lithographic in
 dustry because of their clean-room and vacuum compatibility. Using the mag
 netic fields for bearingless motion concepts\, they have to be controlled 
 actively in six degrees-of-freedom for stable operation. Therefore\, all f
 orce and torque components acting on the translator should be accessible a
 nd be decoupled. Typically\, they provide the long stroke <em>xy</em>-move
 ments\, a short stroke along the <em>z</em>-axis\, and small rotations aro
 und all axes. High-precision bearingless planar motors with magnetic levit
 ation and sub-micrometer accuracy are usually of PM synchronous type. In c
 ontrast to these levitated planar motors\, a novel enabling magnetic suspe
 nsion system underneath a stationary frame &ndash\; elevated propulsion st
 age is developed. It requires an attractive normal force between the frame
  and the translator to counteract the gravitational force\, whereas magnet
 ic levitation above a stationary frame is based on a repulsive normal forc
 e. In this respect\, basically many topologies (synchronous PM\, induction
 \, reluctance ones) are applicable. Several possible topologies for both c
 oncepts of bearingless magnetically levitated and suspended systems are tr
 eated\, a thorough electromagnetic analysis\, and several design and perfo
 rmance criteria are discussed. The decoupling techniques for force and tor
 que components are demonstrated with the aim to realize an active magnetic
  bearing principle. Additionally\, the symmetrical propulsion behavior alo
 ng x and y axes\, and wireless energy transfer from the stationary platfor
 m to the moving platform are demonstrated. All theoretical findings are ve
 rified with experiments of fully operational magnetically levitated and su
 spended stages.<span class="Apple-converted-space">&nbsp\;</span></p>
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