BEGIN:VCALENDAR
VERSION:2.0
PRODID:IEEE vTools.Events//EN
CALSCALE:GREGORIAN
BEGIN:VTIMEZONE
TZID:Australia/Sydney
BEGIN:DAYLIGHT
DTSTART:20201004T030000
TZOFFSETFROM:+1000
TZOFFSETTO:+1100
RRULE:FREQ=YEARLY;BYDAY=1SU;BYMONTH=10
TZNAME:AEDT
END:DAYLIGHT
BEGIN:STANDARD
DTSTART:20210404T020000
TZOFFSETFROM:+1100
TZOFFSETTO:+1000
RRULE:FREQ=YEARLY;BYDAY=1SU;BYMONTH=4
TZNAME:AEST
END:STANDARD
END:VTIMEZONE
BEGIN:VEVENT
DTSTAMP:20210210T231513Z
UID:432A8C95-CE12-45F1-A072-20BBE7E34CE5
DTSTART;TZID=Australia/Sydney:20210210T150000
DTEND;TZID=Australia/Sydney:20210210T163000
DESCRIPTION:Pressure sensors are the earliest commercially successful MEMS 
 sensors and bring out many aspects of the success of MEMS technology. Star
 ting with the standard pressure sensors with bulk micromachined silicon me
 mbranes and polycrystalline silicon piezoresistors\, we introduce modifica
 tions in materials as well as the design to improve the sensitivity and ra
 nge. Low pressure sensors made from silicon\, based on Knudsen’s forces\
 , will also be discussed. Knudsen’s forces are gas molecular forces orig
 inating due to differential temperatures in rarefied gases and can be used
  to measure absolute pressure using microfabricated structures. The fabric
 ated gauge had a sensitivity of 100 fF/Pa and a resolution of 10% in the p
 ressure range 0.1 to 10 Pa. Modifications are underway to expand the range
  and improve the sensitivity.\n\nCo-sponsored by: Prof. Subhas Mukhopadhya
 y\n\nSpeaker(s): Prof. Enakshi Bhattacharya\, \n\nSydney\, New South Wales
 \, Australia\, 2109\, Virtual: https://events.vtools.ieee.org/m/259128
LOCATION:Sydney\, New South Wales\, Australia\, 2109\, Virtual: https://eve
 nts.vtools.ieee.org/m/259128
ORGANIZER:Subhas.Mukhopadhyay@mq.edu.au
SEQUENCE:1
SUMMARY:Silicon MEMS Pressure Sensors 
URL;VALUE=URI:https://events.vtools.ieee.org/m/259128
X-ALT-DESC:Description: <br /><p>Pressure sensors are the earliest commerci
 ally successful MEMS sensors and bring out many aspects of the success of 
 MEMS technology. Starting with the standard pressure sensors with bulk mic
 romachined silicon membranes and polycrystalline silicon piezoresistors\, 
 we introduce modifications in materials as well as the design to improve t
 he sensitivity and range. Low pressure sensors made from silicon\, based o
 n Knudsen&rsquo\;s forces\, will also be discussed. Knudsen&rsquo\;s force
 s are gas molecular forces originating due to differential temperatures in
  rarefied gases and can be used to measure absolute pressure using microfa
 bricated structures. The fabricated gauge had a sensitivity of 100 fF/Pa a
 nd a resolution of 10% in the pressure range 0.1 to 10 Pa. Modifications a
 re underway to expand the range and improve the sensitivity.</p>
END:VEVENT
END:VCALENDAR