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DTSTAMP:20211108T135858Z
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DESCRIPTION:Monolithic ICs have progressed at an unprecedented rate of inno
 vation in the past ~60 years. But\, with Moore’s Law slowing down\, ‘p
 olylithic&#39; integration of heterogeneous ICs and devices is projected to be
  a key driver for performance\, power\, and cost in the next phase of Moor
 e’s Law.\n\nThis presentation will first discuss various emerging hetero
 geneous integration approaches using 2.5D and 3D IC technologies\, includi
 ng those being developed at Georgia Tech’s Integrated 3D Systems Lab. De
 sign considerations and benchmarking of power delivery\, signaling\, and t
 hermal are also described. Second\, a passive self-alignment and assembly 
 approach for optical fibers is demonstrated using a combination of silicon
  micromachining and 3D printing to achieve sub-micron alignment accuracy t
 o underlying silicon-on-insulator (SOI) substrate with monolithic waveguid
 es and couplers in 2.5D/3D IC platforms.\n\nThird\, there exists a perform
 ance gap between TSV-based 3D and monolithic 3D ICs in terms of energy\, b
 andwidth\, and interconnect density. To bridge this gap\, a 3D polylithic 
 integration scheme is proposed which represents a densely integrated syste
 m divided into multiple heterogeneously integrated device tiers. This sche
 me\, termed 3D seamless off-chip connectivity (3D SoC+)\, aims to combine 
 the best of monolithic and TSV-based 3D ICs\, including extreme efficient 
 signaling and massive interconnect density without the fabrication limits 
 of monolithic 3D ICs. As an enabling technology for 3D SoC+\, we demonstra
 te the feasibility of using selective thermal cobalt ALD for Cu-Cu interco
 nnect bonding at low temperature (200 oC).\n\nLastly\, we experimentally d
 emonstrate embedded microfluidic cooling technologies for 2.5D/3D IC archi
 tectures with electrical via integration to enable dense 2.5D/3D electroni
 cs with no thermal limits.\n\nSpeaker(s): Prof. Muhannad Bakir\, \n\nVirtu
 al: https://events.vtools.ieee.org/m/268786
LOCATION:Virtual: https://events.vtools.ieee.org/m/268786
ORGANIZER:m4asad@uwaterloo.ca
SEQUENCE:1
SUMMARY:Emerging 2.5D and 3D Heterogeneous Integration Architectures for th
 e Next Phase of Moore’s Law
URL;VALUE=URI:https://events.vtools.ieee.org/m/268786
X-ALT-DESC:Description: &lt;br /&gt;&lt;div class=&quot;&quot; data-block=&quot;true&quot; data-editor=&quot;
 ct1rv&quot; data-offset-key=&quot;e6f9c-0-0&quot;&gt;\n&lt;div class=&quot;public-DraftStyleDefault-
 block public-DraftStyleDefault-ltr&quot; data-offset-key=&quot;e6f9c-0-0&quot;&gt;&lt;span data
 -offset-key=&quot;e6f9c-0-1&quot;&gt;Monolithic ICs have progressed at an unprecedented
  rate of innovation in the past ~60 years. But\, with Moore&amp;rsquo\;s Law s
 lowing down\, &amp;lsquo\;polylithic&#39; integration of heterogeneous ICs and dev
 ices is projected to be a key driver for performance\, power\, and cost in
  the next phase of Moore&amp;rsquo\;s Law.&lt;/span&gt;&lt;/div&gt;\n&lt;/div&gt;\n&lt;div class=&quot;&quot;
  data-block=&quot;true&quot; data-editor=&quot;ct1rv&quot; data-offset-key=&quot;e6tcj-0-0&quot;&gt;\n&lt;div 
 class=&quot;public-DraftStyleDefault-block public-DraftStyleDefault-ltr&quot; data-o
 ffset-key=&quot;e6tcj-0-0&quot;&gt;&lt;span data-offset-key=&quot;e6tcj-0-0&quot;&gt;This presentation 
 will first discuss various emerging heterogeneous integration approaches u
 sing 2.5D and 3D IC technologies\, including those being developed at Geor
 gia Tech&amp;rsquo\;s Integrated 3D Systems Lab. Design considerations and ben
 chmarking of power delivery\, signaling\, and thermal are also described. 
 Second\, a passive self-alignment and assembly approach for optical fibers
  is demonstrated using a combination of silicon micromachining and 3D prin
 ting to achieve sub-micron alignment accuracy to underlying silicon-on-ins
 ulator (SOI) substrate with monolithic waveguides and couplers in 2.5D/3D 
 IC platforms.&lt;/span&gt;&lt;/div&gt;\n&lt;/div&gt;\n&lt;div class=&quot;&quot; data-block=&quot;true&quot; data-e
 ditor=&quot;ct1rv&quot; data-offset-key=&quot;4f058-0-0&quot;&gt;\n&lt;div class=&quot;public-DraftStyleD
 efault-block public-DraftStyleDefault-ltr&quot; data-offset-key=&quot;4f058-0-0&quot;&gt;&lt;sp
 an data-offset-key=&quot;4f058-0-0&quot;&gt;Third\, there exists a performance gap betw
 een TSV-based 3D and monolithic 3D ICs in terms of energy\, bandwidth\, an
 d interconnect density. To bridge this gap\, a 3D polylithic integration s
 cheme is proposed which represents a densely integrated system divided int
 o multiple heterogeneously integrated device tiers. This scheme\, termed 3
 D seamless off-chip connectivity (3D SoC+)\, aims to combine the best of m
 onolithic and TSV-based 3D ICs\, including extreme efficient signaling and
  massive interconnect density without the fabrication limits of monolithic
  3D ICs. As an enabling technology for 3D SoC+\, we demonstrate the feasib
 ility of using selective thermal cobalt ALD for Cu-Cu interconnect bonding
  at low temperature (200 oC).&lt;/span&gt;&lt;/div&gt;\n&lt;/div&gt;\n&lt;div class=&quot;&quot; data-blo
 ck=&quot;true&quot; data-editor=&quot;ct1rv&quot; data-offset-key=&quot;fbjoi-0-0&quot;&gt;\n&lt;div class=&quot;pu
 blic-DraftStyleDefault-block public-DraftStyleDefault-ltr&quot; data-offset-key
 =&quot;fbjoi-0-0&quot;&gt;&lt;span data-offset-key=&quot;fbjoi-0-0&quot;&gt;Lastly\, we experimentally 
 demonstrate embedded microfluidic cooling technologies for 2.5D/3D IC arch
 itectures with electrical via integration to enable dense 2.5D/3D electron
 ics with no thermal limits.&lt;/span&gt;&lt;/div&gt;\n&lt;/div&gt;
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