BEGIN:VCALENDAR VERSION:2.0 PRODID:IEEE vTools.Events//EN CALSCALE:GREGORIAN BEGIN:VTIMEZONE TZID:America/Los_Angeles BEGIN:DAYLIGHT DTSTART:20220313T030000 TZOFFSETFROM:-0800 TZOFFSETTO:-0700 RRULE:FREQ=YEARLY;BYDAY=2SU;BYMONTH=3 TZNAME:PDT END:DAYLIGHT BEGIN:STANDARD DTSTART:20221106T010000 TZOFFSETFROM:-0700 TZOFFSETTO:-0800 RRULE:FREQ=YEARLY;BYDAY=1SU;BYMONTH=11 TZNAME:PST END:STANDARD END:VTIMEZONE BEGIN:VEVENT DTSTAMP:20221117T004158Z UID:0AABF7A0-FF3F-417C-9FAE-A3655B13F143 DTSTART;TZID=America/Los_Angeles:20221027T114500 DTEND;TZID=America/Los_Angeles:20221027T130000 DESCRIPTION:Abstract:\n\nAluminum Nitride (AlN) is a well-established thin film piezoelectric material. AlN bulk acoustic wave (BAW) radio frequency (RF) filters were one of the key innovations that enabled the 3G and 4G sm art phone revolution. Recently\, the substitutional doping of scandium (Sc ) for aluminum (Al) to form aluminum scandium nitride (AlScN) has been stu died to significantly enhance the piezoelectric properties and to introduc e ferroelectric properties into AlN based material systems. The properties achieved have profound implications for the performance of future 5G and 6G RF filters\, piezoelectric sensors\, piezoelectric energy harvesters\, and for scaling the bit density of ferroelectric nonvolatile memories (NMV ). This talk will present on the synthesis of highly Sc alloyed AlScN mate rials of the thickness (5 nm to 1000 nm)\, stress\, and crystallinity requ ired for applications in NVM and microelectromechanical systems (MEMS). Th e material properties and device performance achieved will be reported and placed in the context of device specific figures-of-merit. Exemplar AlScN based memory\, RF\, and magnetoelectric sensor devices will be presented and discussed in the context of alternative technologies.\n\nSpeaker(s): P rof. Troy Olsson\, \n\nAgenda: \n11:45 AM – 12 PM Event check-in\n\n12 – 12:05 PM Announcements\n\n12:05 – 12:50 PM Invited Talk\n\n12:50 – 1 PM Questions & Answers\n\nRoom: Conference Center (ECC1)\, Bldg: Buildi ng E\, 2900 Semiconductor Dr\, Texas Instruments\, Santa Clara\, Californi a\, United States\, 95051 LOCATION:Room: Conference Center (ECC1)\, Bldg: Building E\, 2900 Semicondu ctor Dr\, Texas Instruments\, Santa Clara\, California\, United States\, 9 5051 ORGANIZER:jeronimo.segovia@ieee.org SEQUENCE:3 SUMMARY:Aluminum Scandium Nitride Thin Films and Microdevices for Next Gene ration Nonvolatile Memory\, Radio Frequency Filters\, and Magnetoelectric Sensors URL;VALUE=URI:https://events.vtools.ieee.org/m/328867 X-ALT-DESC:Description: <br /><p><strong>Abstract:</strong></p>\n<p>Aluminu m Nitride (AlN) is a well-established thin film piezoelectric material. Al N bulk acoustic wave (BAW) radio frequency (RF) filters were one of the ke y innovations that enabled the 3G and 4G smart phone revolution.&nbsp\; Re cently\, the substitutional doping of scandium (Sc) for aluminum (Al) to f orm aluminum scandium nitride (AlScN) has been studied to significantly en hance the piezoelectric properties and to introduce ferroelectric properti es into AlN based material systems. The properties achieved have profound implications for the performance of future 5G and 6G RF filters\, piezoele ctric sensors\, piezoelectric energy harvesters\, and for scaling the bit density of ferroelectric nonvolatile memories (NMV). This talk will presen t on the synthesis of highly Sc alloyed AlScN materials of the thickness ( 5 nm to 1000 nm)\, stress\, and crystallinity required for applications in NVM and microelectromechanical systems (MEMS). The material properties an d device performance achieved will be reported and placed in the context o f device specific figures-of-merit. Exemplar AlScN based memory\, RF\, and magnetoelectric sensor devices will be presented and discussed in the con text of alternative technologies.&nbsp\;&nbsp\;&nbsp\; &nbsp\;&nbsp\;&nbsp \;</p><br /><br />Agenda: <br /><p data-key="32"><span data-key="33"><stro ng data-slate-leaf="true">11:45 AM &ndash\; 12 PM Event check-in&nbsp\;</s trong></span></p>\n<p data-key="32"><span data-key="33"><strong data-slate -leaf="true">12 &ndash\; 12:05 PM Announcements&nbsp\;</strong></span></p> \n<p data-key="34"><span data-key="35"><strong data-slate-leaf="true">12:0 5 &ndash\; 12:50 PM Invited Talk</strong></span></p>\n<p data-key="36" dat a-slate-fragment="JTdCJTIyb2JqZWN0JTIyJTNBJTIyZG9jdW1lbnQlMjIlMkMlMjJkYXRh JTIyJTNBJTdCJTdEJTJDJTIybm9kZXMlMjIlM0ElNUIlN0IlMjJvYmplY3QlMjIlM0ElMjJibG 9jayUyMiUyQyUyMnR5cGUlMjIlM0ElMjJwYXJhZ3JhcGglMjIlMkMlMjJkYXRhJTIyJTNBJTdC JTIyY2xhc3NOYW1lJTIyJTNBbnVsbCU3RCUyQyUyMm5vZGVzJTIyJTNBJTVCJTdCJTIyb2JqZW N0JTIyJTNBJTIydGV4dCUyMiUyQyUyMmxlYXZlcyUyMiUzQSU1QiU3QiUyMm9iamVjdCUyMiUz QSUyMmxlYWYlMjIlMkMlMjJ0ZXh0JTIyJTNBJTIyNiUzQTMwJTIwJUUyJTgwJTkzJTIwNiUzQT Q1JTIwUE0lMjAlMjBXZWJleCUyMFJlZ2lzdHJhdGlvbiUyMiUyQyUyMm1hcmtzJTIyJTNBJTVC JTdCJTIyb2JqZWN0JTIyJTNBJTIybWFyayUyMiUyQyUyMnR5cGUlMjIlM0ElMjJib2xkJTIyJT JDJTIyZGF0YSUyMiUzQSU3QiU3RCU3RCU1RCU3RCU1RCU3RCU1RCU3RCUyQyU3QiUyMm9iamVj dCUyMiUzQSUyMmJsb2NrJTIyJTJDJTIydHlwZSUyMiUzQSUyMnBhcmFncmFwaCUyMiUyQyUyMm RhdGElMjIlM0ElN0IlMjJjbGFzc05hbWUlMjIlM0FudWxsJTdEJTJDJTIybm9kZXMlMjIlM0El NUIlN0IlMjJvYmplY3QlMjIlM0ElMjJ0ZXh0JTIyJTJDJTIybGVhdmVzJTIyJTNBJTVCJTdCJT Iyb2JqZWN0JTIyJTNBJTIybGVhZiUyMiUyQyUyMnRleHQlMjIlM0ElMjI2JTNBNDUlMjAlRTIl ODAlOTMlMjA3JTNBMzAlMjBQTSUyMCUyMEludml0ZWQlMjBUYWxrJTIyJTJDJTIybWFya3MlMj IlM0ElNUIlN0IlMjJvYmplY3QlMjIlM0ElMjJtYXJrJTIyJTJDJTIydHlwZSUyMiUzQSUyMmJv bGQlMjIlMkMlMjJkYXRhJTIyJTNBJTdCJTdEJTdEJTVEJTdEJTVEJTdEJTVEJTdEJTJDJTdCJT Iyb2JqZWN0JTIyJTNBJTIyYmxvY2slMjIlMkMlMjJ0eXBlJTIyJTNBJTIycGFyYWdyYXBoJTIy JTJDJTIyZGF0YSUyMiUzQSU3QiUyMmNsYXNzTmFtZSUyMiUzQW51bGwlN0QlMkMlMjJub2Rlcy UyMiUzQSU1QiU3QiUyMm9iamVjdCUyMiUzQSUyMnRleHQlMjIlMkMlMjJsZWF2ZXMlMjIlM0El NUIlN0IlMjJvYmplY3QlMjIlM0ElMjJsZWFmJTIyJTJDJTIydGV4dCUyMiUzQSUyMjclM0EzMC UyMCVFMiU4MCU5MyUyMDclM0E0NSUyMFBNJTIwJTIwUXVlc3Rpb25zJTIwJTI2JTIwQW5zd2Vy cyUyMiUyQyUyMm1hcmtzJTIyJTNBJTVCJTdCJTIyb2JqZWN0JTIyJTNBJTIybWFyayUyMiUyQy UyMnR5cGUlMjIlM0ElMjJib2xkJTIyJTJDJTIyZGF0YSUyMiUzQSU3QiU3RCU3RCU1RCU3RCU1 RCU3RCU1RCU3RCU1RCU3RA=="><span data-key="37"><strong data-slate-leaf="tru e">12:50 &ndash\; 1 PM Questions &amp\; Answers</strong></span></p> END:VEVENT END:VCALENDAR