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DTSTART:20231105T010000
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DTSTAMP:20230427T161855Z
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DESCRIPTION:Micro/nanoelectromechanical systems (MEMS/NEMS) have been signi
 ficant enabling technologies in the ‘More-than-Moore’ paradigm. They h
 ave not only directly led to the realization of numerous sensors\, actuato
 rs\, and communication devices in semiconductor industry\, but also tremen
 dously facilitated advances in transducers and precision instruments in ex
 ploratory research and cutting-edge metrology. When combined with advanced
  materials\, such as SiC\, GaN\, other related materials\, and their heter
 ostructures\, MEMS/NEMS transducers are also highly attractive for applica
 tions at high temperature\, and in harsh and even extreme environments\, i
 ncluding exposure to various radiation conditions. In this presentation\, 
 I will introduce the fundamentals of radiation effects on solid-state micr
 o/nanomechanical structures\, and the important experimental techniques fo
 r probing and quantifying such effects. I will then focus on discussing ou
 r multidisciplinary team’s collaborative research thrusts (with the ISDE
  at Vanderbilt University and other collaborators) and recent progress on 
 studying radiation effects of gamma-ray\, X-ray\, protons\, and energetic 
 heavy ions upon various MEMS/NEMS transducers\, including switches and mul
 timode resonators with different geometries and dimensions\, and including
  devices made of Si\, SiC\, GaN\, Ga2O3\, and 2D semiconductors. Finally\,
  based on the findings\, we shall discuss challenges\, opportunities\, and
  future perspectives of advancing MEMS/NEMS for emerging applications in s
 pace and other radiation environments.\n\nCo-sponsored by: CH02167- Northe
 rn Virginia/Washington Nanotechnology Council\, NANO42\n\nSpeaker(s): Prof
 . Philip Feng\, \n\nVirtual: https://events.vtools.ieee.org/m/354073
LOCATION:Virtual: https://events.vtools.ieee.org/m/354073
ORGANIZER:nfhaddad@aol.com
SEQUENCE:9
SUMMARY:Radiation Effects in MEMS/NEMS: Fundamentals and Recent Progress
URL;VALUE=URI:https://events.vtools.ieee.org/m/354073
X-ALT-DESC:Description: &lt;br /&gt;&lt;p&gt;Micro/nanoelectromechanical systems (MEMS/
 NEMS) have been significant enabling technologies in the &amp;lsquo\;More-than
 -Moore&amp;rsquo\; paradigm. They have not only directly led to the realizatio
 n of numerous sensors\, actuators\, and communication devices in semicondu
 ctor industry\, but also tremendously facilitated advances in transducers 
 and precision instruments in exploratory research and cutting-edge metrolo
 gy. When combined with advanced materials\, such as SiC\, GaN\, other rela
 ted materials\, and their heterostructures\, MEMS/NEMS transducers are als
 o highly attractive for applications at high temperature\, and in harsh an
 d even extreme environments\, including exposure to various radiation cond
 itions. In this presentation\, I will introduce the fundamentals of radiat
 ion effects on solid-state micro/nanomechanical structures\, and the impor
 tant experimental techniques for probing and quantifying such effects. I w
 ill then focus on discussing our multidisciplinary team&amp;rsquo\;s collabora
 tive research thrusts (with the ISDE at Vanderbilt University and other co
 llaborators) and recent progress on studying radiation effects of gamma-ra
 y\, X-ray\, protons\, and energetic heavy ions upon various MEMS/NEMS tran
 sducers\, including switches and multimode resonators with different geome
 tries and dimensions\, and including devices made of Si\, SiC\, GaN\, Ga&lt;s
 ub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt;\, and 2D semiconductors. Finally\, based on the fi
 ndings\, we shall discuss challenges\, opportunities\, and future perspect
 ives of advancing MEMS/NEMS for emerging applications in space and other r
 adiation environments.&amp;nbsp\;&lt;/p&gt;
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