BEGIN:VCALENDAR VERSION:2.0 PRODID:IEEE vTools.Events//EN CALSCALE:GREGORIAN BEGIN:VTIMEZONE TZID:America/Los_Angeles BEGIN:DAYLIGHT DTSTART:20240310T030000 TZOFFSETFROM:-0800 TZOFFSETTO:-0700 RRULE:FREQ=YEARLY;BYDAY=2SU;BYMONTH=3 TZNAME:PDT END:DAYLIGHT BEGIN:STANDARD DTSTART:20231105T010000 TZOFFSETFROM:-0700 TZOFFSETTO:-0800 RRULE:FREQ=YEARLY;BYDAY=1SU;BYMONTH=11 TZNAME:PST END:STANDARD END:VTIMEZONE BEGIN:VEVENT DTSTAMP:20240325T170330Z UID:486CF194-57B4-44CB-BD65-96523DA2BA42 DTSTART;TZID=America/Los_Angeles:20240131T183000 DTEND;TZID=America/Los_Angeles:20240131T200000 DESCRIPTION:Abstract:\n\nAccess to nanoscale piezoelectric transducers in a dvanced semiconductor processes enables realization of acoustic resonators on CMOS chips. Monolithically integrated acoustic resonators facilitate t he creation of on-chip clocks\, local oscillators\, and filters with impro ved performance\, size\, and cost.\n\nThe discovery of ferroelectricity in fluorite-structured oxides\, such as hafnia and zirconia\, has augured th e emergence of the long-coveted CMOS piezoelectric transducer. Atomic-laye r-deposited hafnia-zirconia are already used\, in amorphous form\, as high -k dielectrics in advanced semiconductor nodes. Once subjected to proper a tomic engineering\, these fluorites can take polar crystalline forms with large piezoelectric coupling that enables creation of high-performance aco ustic resonators.\n\nIn this talk\, I will present an overview on CMOS-bas ed fluorite ferroelectrics and their properties pertained to nanoelectrome chanical systems (NEMS) resonator performance merits. I will introduce our efforts on (1) developing hafnia-zirconia piezoelectric transducers for c reation of super-high-frequency NEMS resonators with high electromechanica l-coupling and quality-factor\, and intrinsic switchability\, (2) developm ent of three-dimensional acoustic resonator technology based on integratin g hafnia-zirconia on semiconductor fins\, enabling massive integration of multi-band filter arrays and wideband switch-free multiplexers\, and (3) d evelopment of ultra-stable oscillators using temperature-compensated hafni a-zirconia resonators.\n\nSpeaker(s): Prof. Roozbeh Tabrizian\, \n\nAgenda : \n6:30 – 6:50 PM Zoom Registration & Networking\n\n6:50 – 7:00 PM An nouncements & Polling\n\n7:00 – 7:45 PM Invited Talk\n\n7:45 – 8:00 PM Questions & Answers\n\nVirtual: https://events.vtools.ieee.org/m/400594 LOCATION:Virtual: https://events.vtools.ieee.org/m/400594 ORGANIZER:jeronimo.segovia@ieee.org SEQUENCE:22 SUMMARY:Unleashing the Power of Mechanics on CMOS: Hafnia Nanoelectromechan ical Systems For RF Frequency Control URL;VALUE=URI:https://events.vtools.ieee.org/m/400594 X-ALT-DESC:Description: <br /><p><strong>Abstract:</strong></p>\n<p style=" font-weight: 400\;">Access to nanoscale piezoelectric transducers in advan ced semiconductor processes enables realization of acoustic resonators on CMOS chips. Monolithically integrated acoustic resonators facilitate the c reation of on-chip clocks\, local oscillators\, and filters with improved performance\, size\, and cost.</p>\n<p style="font-weight: 400\;">The disc overy of ferroelectricity in fluorite-structured oxides\, such as hafnia a nd zirconia\, has augured the emergence of the long-coveted CMOS piezoelec tric transducer. Atomic-layer-deposited hafnia-zirconia are already used\, in amorphous form\, as high-k dielectrics in advanced semiconductor nodes . Once subjected to proper atomic engineering\, these fluorites can take p olar crystalline forms with large piezoelectric coupling that enables crea tion of high-performance acoustic resonators.</p>\n<p style="font-weight: 400\;">In this talk\, I will present an overview on CMOS-based fluorite fe rroelectrics and their properties pertained to nanoelectromechanical syste ms (NEMS) resonator performance merits. I will introduce our efforts on (1 ) developing hafnia-zirconia piezoelectric transducers for creation of sup er-high-frequency NEMS resonators with high electromechanical-coupling and quality-factor\, and intrinsic switchability\, (2) development of three-d imensional acoustic resonator technology based on integrating hafnia-zirco nia on semiconductor fins\, enabling massive integration of multi-band fil ter arrays and wideband switch-free multiplexers\, and (3) development of ultra-stable oscillators using temperature-compensated hafnia-zirconia res onators.</p><br /><br />Agenda: <br /><p data-key="32"><span data-key="33" ><strong data-slate-leaf="true">6:30 &ndash\; 6:50 PM Zoom Registration &a mp\; Networking</strong></span></p>\n<p data-key="32"><span data-key="33"> <strong data-slate-leaf="true">6:50 &ndash\; 7:00 PM Announcements &amp\; Polling</strong></span></p>\n<p data-key="34"><span data-key="35"><strong data-slate-leaf="true">7:00 &ndash\; 7:45 PM Invited Talk</strong></span>< /p>\n<p data-key="36" data-slate-fragment="JTdCJTIyb2JqZWN0JTIyJTNBJTIyZG9 jdW1lbnQlMjIlMkMlMjJkYXRhJTIyJTNBJTdCJTdEJTJDJTIybm9kZXMlMjIlM0ElNUIlN0IlM jJvYmplY3QlMjIlM0ElMjJibG9jayUyMiUyQyUyMnR5cGUlMjIlM0ElMjJwYXJhZ3JhcGglMjI lMkMlMjJkYXRhJTIyJTNBJTdCJTIyY2xhc3NOYW1lJTIyJTNBbnVsbCU3RCUyQyUyMm5vZGVzJ TIyJTNBJTVCJTdCJTIyb2JqZWN0JTIyJTNBJTIydGV4dCUyMiUyQyUyMmxlYXZlcyUyMiUzQSU 1QiU3QiUyMm9iamVjdCUyMiUzQSUyMmxlYWYlMjIlMkMlMjJ0ZXh0JTIyJTNBJTIyNiUzQTMwJ TIwJUUyJTgwJTkzJTIwNiUzQTQ1JTIwUE0lMjAlMjBXZWJleCUyMFJlZ2lzdHJhdGlvbiUyMiU yQyUyMm1hcmtzJTIyJTNBJTVCJTdCJTIyb2JqZWN0JTIyJTNBJTIybWFyayUyMiUyQyUyMnR5c GUlMjIlM0ElMjJib2xkJTIyJTJDJTIyZGF0YSUyMiUzQSU3QiU3RCU3RCU1RCU3RCU1RCU3RCU 1RCU3RCUyQyU3QiUyMm9iamVjdCUyMiUzQSUyMmJsb2NrJTIyJTJDJTIydHlwZSUyMiUzQSUyM nBhcmFncmFwaCUyMiUyQyUyMmRhdGElMjIlM0ElN0IlMjJjbGFzc05hbWUlMjIlM0FudWxsJTd EJTJDJTIybm9kZXMlMjIlM0ElNUIlN0IlMjJvYmplY3QlMjIlM0ElMjJ0ZXh0JTIyJTJDJTIyb GVhdmVzJTIyJTNBJTVCJTdCJTIyb2JqZWN0JTIyJTNBJTIybGVhZiUyMiUyQyUyMnRleHQlMjI lM0ElMjI2JTNBNDUlMjAlRTIlODAlOTMlMjA3JTNBMzAlMjBQTSUyMCUyMEludml0ZWQlMjBUY WxrJTIyJTJDJTIybWFya3MlMjIlM0ElNUIlN0IlMjJvYmplY3QlMjIlM0ElMjJtYXJrJTIyJTJ DJTIydHlwZSUyMiUzQSUyMmJvbGQlMjIlMkMlMjJkYXRhJTIyJTNBJTdCJTdEJTdEJTVEJTdEJ TVEJTdEJTVEJTdEJTJDJTdCJTIyb2JqZWN0JTIyJTNBJTIyYmxvY2slMjIlMkMlMjJ0eXBlJTI yJTNBJTIycGFyYWdyYXBoJTIyJTJDJTIyZGF0YSUyMiUzQSU3QiUyMmNsYXNzTmFtZSUyMiUzQ W51bGwlN0QlMkMlMjJub2RlcyUyMiUzQSU1QiU3QiUyMm9iamVjdCUyMiUzQSUyMnRleHQlMjI lMkMlMjJsZWF2ZXMlMjIlM0ElNUIlN0IlMjJvYmplY3QlMjIlM0ElMjJsZWFmJTIyJTJDJTIyd GV4dCUyMiUzQSUyMjclM0EzMCUyMCVFMiU4MCU5MyUyMDclM0E0NSUyMFBNJTIwJTIwUXVlc3R pb25zJTIwJTI2JTIwQW5zd2VycyUyMiUyQyUyMm1hcmtzJTIyJTNBJTVCJTdCJTIyb2JqZWN0J TIyJTNBJTIybWFyayUyMiUyQyUyMnR5cGUlMjIlM0ElMjJib2xkJTIyJTJDJTIyZGF0YSUyMiU zQSU3QiU3RCU3RCU1RCU3RCU1RCU3RCU1RCU3RCU1RCU3RA=="><span data-key="37"><st rong data-slate-leaf="true">7:45 &ndash\; 8:00 PM Questions &amp\; Answers </strong></span></p> END:VEVENT END:VCALENDAR