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DTSTART:20240310T030000
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DTSTART:20241103T010000
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DTSTAMP:20240430T160121Z
UID:7329579D-CE12-410A-91E9-CF1A5231C328
DTSTART;TZID=America/New_York:20240422T173000
DTEND;TZID=America/New_York:20240423T160000
DESCRIPTION:[Click Here to Register Now!](https://events.vtools.ieee.org/ev
 ent/register/414976)\n\nThis conference brings together students\, faculty
 \, alumni\, friends and industry guests interested in Microelectronic Engi
 neering. Key elements of the conference are: technical presentations by se
 niors on their capstone research and design projects\, industry and alumni
  presentations\, recognition of companies who have supported the program\,
  review of program activities and achievements over the past year and indu
 stry feedback on student and academic program activities.\n\nThe event beg
 ins on Monday evening with a reception and dinner at the RIT Inn &amp; Confere
 nce Center. The reception starts at 5:30pm\, with dinner at 6:30pm and spe
 akers to follow.\n\n[Off-campus map - RIT Inn &amp; Conference Center](https:/
 /maps.rit.edu/?details=RIT+Inn+&amp;+Conference+Center)\n\nThe technical sessi
 on is on Tuesday from 8am - 4pm in the Center for Integrated Manufacturing
  (CIMS\, SLA/078).\n\n[Campus map - CIMS Conference Center](https://maps.r
 it.edu/?details=CIMS+Conference+Center)\n\nRegistration is required (no ch
 arge) to determine meal orders.\n\nSpeaker(s): Baljit Singh\, Todd Layer\,
  Ben Eynon\, Mycahya Eggleston\, Lynn Fuller\n\nAgenda: \nMonday April 22\
 , 2024\n\n5:30 p.m. Reception at the RIT Inn and Conference Center\n\nDinn
 er Agenda\n\n6:30 p.m. Dinner Begins\n7:00 p.m. Program Begins\n\nWelcome 
 by Dr. Karl Hirschman\, Micron Professor\, Microelectronic Engineering Pro
 gram Director\n“Semiconductor Synergy: India&#39;s Semiconductor Landscape a
 nd Collaborations with RIT”\, Baljit Singh\, BS MicroE ‘93\, CEO of Aj
 uba USA/India.\n“Microelectronic Engineering – The Year in Review”\,
  Dr. Robert Pearson\, Past Director of the Microelectronic Engineering Pro
 gram\n\nAwards\n\n- Dr. Renan Turkman Scholarship Award Announcement\n- Dr
 . Lynn Fuller Scholarship Award Announcement\n\nClosing Remarks: Dr. Karl 
 Hirschman\n\nTuesday April 23\, 2024\n8:00 – 8:30 a.m. Registration CIMS
 \n\nTechnical Program Agenda\n\nMorning Session AM-1\nSession Chair: Dr. R
 obert Pearson\, Associate Professor\n\n8:30 a.m. Opening Remarks\, Dr. Kar
 l Hirschman\, Micron Professor\, Microelectronic Engineering Program Direc
 tor\n8:35 a.m. “Wolfpeed Powering and Manufacturing the Possibilities“
 \, Todd Layer\, MicroE BS ‘87\, Director\, Equipment and Maintenance Eng
 ineering\, North Carolina Fabs (NCF)\, Wolfspeed\n9:05 a.m. “Micro Trans
 fer Printing Tool Characterization”\, Trevor Woodard\, Senior MicroE ‘
 24\n9:25 a.m. “Fabrication of a Metal-Dielectric DUV Band-pass Optical F
 ilter”\, Ian Endres\, Senior MicroE ‘24\n9:45 a.m. BREAK and Posters\n
 \nMorning Session AM-2\nSession Chair: Dr. Karl Hirschman\, Micron Profess
 or\n\n10:15 a.m. “EUV Dry Resist and Process for 2nm Node Patterning and
  Beyond”\, Ben Eynon\, MicroE BS ’87\, Lam Research\n10:45 am “An Ex
 ploration of SiC Top-Down Microfabrication Methods”\, Laura Armellino\, 
 Senior MicroE ‘24\n11:05 a.m. &quot; Germanium Detectors for the Infrared Spe
 ctrum”\, Ceili Lipp\, Senior MicroE ‘24 24\n11:25 a.m. “Analysis of 
 performance of IGZO TFTs”\, Alex Moore\, Senior MicroE ‘24\n11:45 a.m.
  LUNCH\n\nAfternoon Session PM-1\nSession Chair: Sean Rommel\, Professor\n
 1:00 p.m. Upwards Remarks\, Parsian Mohseni\, Associate Professor\n1:05 p.
 m. “Critical Dimension Uniformity - Every Angstrom Counts”\, Mycahya E
 ggleston\, BS MicroE ’17\, Senior Engineer\, Critical Dimension Uniformi
 ty\, Micron Technology\n1:35 p.m. “Cleanroom MES and SPC Systems Design 
 and Implementation”\, Carl Kulesza\, Senior MicroE ‘24\n1:55 p.m. “R
 adiation Hardening of a III-V Solar Cell Via Graded Doping”\, Katelynn B
 lank\, Senior MicroE ‘24\n2:15 p.m. BREAK\n\nAfternoon Session PM-2\nSes
 sion Chair: Michael Jackson\, Associate Professor\n2:30 p.m. “The Import
 ance of Actually Teaching CMOS Manufacturing in a University Lab Setting
 ”\, Dr. Lynn Fuller\, RIT Professor Emeritus\n\n3:00 p.m. “Development
  of a Dry Etching Process for Germanium”\, Dylan Bruno\, Senior MicroE 
 ‘24\n3:20 p.m. “Thin Film Optical Filter for Astronomical Applications
 ”\, Tucker Dunham\, Senior MicroE ’24\n3:40 p.m. Technical Session Clo
 sing Remarks - Dr. Sean Rommel\n\nRoom: 2210 - 2240\, Bldg: CIMS / Slaught
 er Hall  SLA/078 (campus map)\, Rochester Institute of Technology\, One Lo
 mb Memorial Drive\, Rochester\, New York\, United States\, 14623
LOCATION:Room: 2210 - 2240\, Bldg: CIMS / Slaughter Hall  SLA/078 (campus m
 ap)\, Rochester Institute of Technology\, One Lomb Memorial Drive\, Roches
 ter\, New York\, United States\, 14623
ORGANIZER:kdhemc@rit.edu
SEQUENCE:64
SUMMARY:42nd Annual Microelectronic Engineering Conference at RIT
URL;VALUE=URI:https://events.vtools.ieee.org/m/414976
X-ALT-DESC:Description: &lt;br /&gt;&lt;p&gt;&lt;span style=&quot;font-size: 18pt\; color: #000
 000\; background-color: #bfedd2\;&quot;&gt;&lt;strong&gt;&lt;a style=&quot;color: #000000\; back
 ground-color: #bfedd2\;&quot; href=&quot;https://events.vtools.ieee.org/event/regist
 er/414976&quot;&gt;Click Here to Register Now!&lt;/a&gt;&lt;/strong&gt;&lt;/span&gt;&lt;/p&gt;\n&lt;p&gt;This co
 nference brings together students\, faculty\, alumni\, friends and industr
 y guests interested in Microelectronic Engineering. Key elements of the co
 nference are: technical presentations by seniors on their capstone researc
 h and design projects\, industry and alumni presentations\, recognition of
  companies who have supported the program\, review of program activities a
 nd achievements over the past year and industry feedback on student and ac
 ademic program activities.&lt;/p&gt;\n&lt;p&gt;The event begins on Monday evening with
  a reception and dinner at the RIT Inn &amp;amp\; Conference Center.&amp;nbsp\; Th
 e reception starts at 5:30pm\, with dinner at 6:30pm and speakers to follo
 w.&amp;nbsp\;&lt;/p&gt;\n&lt;p&gt;&lt;a title=&quot;RIT Inn &amp;amp\; Conference Center &quot; href=&quot;https
 ://maps.rit.edu/?details=RIT+Inn+&amp;amp\;+Conference+Center&quot;&gt;Off-campus map 
 - RIT Inn &amp;amp\; Conference Center&lt;/a&gt;&lt;/p&gt;\n&lt;p&gt;The technical session is on
  Tuesday from 8am - 4pm in the Center for Integrated Manufacturing (CIMS\,
  SLA/078).&amp;nbsp\;&lt;/p&gt;\n&lt;p&gt;&lt;a href=&quot;https://maps.rit.edu/?details=CIMS+Conf
 erence+Center&quot;&gt;Campus map - CIMS Conference Center&lt;/a&gt;&lt;/p&gt;\n&lt;p&gt;Registratio
 n is required (no charge) to determine meal orders.&amp;nbsp\;&amp;nbsp\;&lt;/p&gt;&lt;br /
 &gt;&lt;br /&gt;Agenda: &lt;br /&gt;&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0i
 n\; margin-bottom: .0001pt\; mso-add-space: auto\; line-height: normal\;&quot;&gt;
 &lt;strong&gt;Monday April 22\, 2024&lt;/strong&gt;&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxS
 pLast&quot; style=&quot;margin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\;
  line-height: normal\;&quot;&gt;&lt;br&gt;5:30 p.m. Reception at the RIT Inn and Confere
 nce Center&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0in\; m
 argin-bottom: .0001pt\; mso-add-space: auto\; line-height: normal\;&quot;&gt;&lt;br&gt;&lt;
 strong&gt;Dinner Agenda&lt;/strong&gt;&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; sty
 le=&quot;margin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-heig
 ht: normal\;&quot;&gt;&lt;br&gt;6:30 p.m. Dinner Begins&lt;br&gt;7:00 p.m. Program Begins&lt;/p&gt;\
 n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0in\; margin-bottom: .
 0001pt\; mso-add-space: auto\; line-height: normal\;&quot;&gt;&lt;br&gt;Welcome by Dr. K
 arl Hirschman\, Micron Professor\, Microelectronic Engineering Program Dir
 ector&lt;br&gt;&amp;ldquo\;Semiconductor Synergy: India&#39;s Semiconductor Landscape an
 d Collaborations with RIT&amp;rdquo\;\, Baljit Singh\, BS MicroE &amp;lsquo\;93\, 
 CEO of Ajuba USA/India.&lt;br&gt;&amp;ldquo\;Microelectronic Engineering &amp;ndash\; Th
 e Year in Review&amp;rdquo\;\, Dr. Robert Pearson\, Past Director of the Micro
 electronic Engineering Program&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; st
 yle=&quot;margin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-hei
 ght: normal\;&quot;&gt;&amp;nbsp\;&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;mar
 gin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-height: nor
 mal\;&quot;&gt;&lt;strong&gt;Awards&lt;/strong&gt;&lt;/p&gt;\n&lt;ul&gt;\n&lt;li class=&quot;MsoListParagraphCxSpL
 ast&quot; style=&quot;line-height: normal\;&quot;&gt;Dr. Renan Turkman Scholarship Award Ann
 ouncement&lt;/li&gt;\n&lt;li class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;line-height: n
 ormal\;&quot;&gt;Dr. Lynn Fuller Scholarship Award Announcement&lt;/li&gt;\n&lt;/ul&gt;\n&lt;p cl
 ass=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0in\; margin-bottom: .0001pt
 \; mso-add-space: auto\; line-height: normal\;&quot;&gt;&lt;br&gt;&lt;strong&gt;Closing Remark
 s:&lt;/strong&gt; Dr. Karl Hirschman&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; st
 yle=&quot;margin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-hei
 ght: normal\;&quot;&gt;&lt;br&gt;&lt;strong&gt;Tuesday April 23\, 2024&lt;/strong&gt;&lt;br&gt;8:00 &amp;ndash
 \; 8:30 a.m. Registration CIMS&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; st
 yle=&quot;margin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-hei
 ght: normal\;&quot;&gt;&lt;br&gt;&lt;strong&gt;Technical Program Agenda&lt;/strong&gt;&lt;/p&gt;\n&lt;p class
 =&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0in\; margin-bottom: .0001pt\; 
 mso-add-space: auto\; line-height: normal\;&quot;&gt;&lt;br&gt;&lt;strong&gt;Morning Session A
 M-1&lt;/strong&gt;&lt;br&gt;&lt;strong&gt;Session Chair: &lt;/strong&gt;Dr. Robert Pearson\, Assoc
 iate Professor&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0in
 \; margin-bottom: .0001pt\; mso-add-space: auto\; line-height: normal\;&quot;&gt;&lt;
 br&gt;8:30 a.m. Opening Remarks\, Dr. Karl Hirschman\, Micron Professor\, Mic
 roelectronic Engineering Program Director&lt;br&gt;8:35 a.m. &amp;ldquo\;Wolfpeed Po
 wering and Manufacturing the Possibilities&amp;ldquo\;\, Todd Layer\, MicroE B
 S &amp;lsquo\;87\, Director\, Equipment and Maintenance Engineering\, North Ca
 rolina Fabs (NCF)\, Wolfspeed&lt;br&gt;9:05 a.m. &amp;ldquo\;Micro Transfer Printing
  Tool Characterization&amp;rdquo\;\, Trevor Woodard\, Senior MicroE &amp;lsquo\;24
 &lt;br&gt;9:25 a.m. &amp;ldquo\;Fabrication of a Metal-Dielectric DUV Band-pass Opti
 cal Filter&amp;rdquo\;\, Ian Endres\, Senior MicroE &amp;lsquo\;24&lt;br&gt;9:45 a.m. BR
 EAK and Posters&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 0i
 n\; margin-bottom: .0001pt\; mso-add-space: auto\; line-height: normal\;&quot;&gt;
 &lt;br&gt;&lt;strong&gt;Morning Session AM-2&lt;/strong&gt;&lt;br&gt;&lt;strong&gt;Session Chair:&lt;/stron
 g&gt; Dr. Karl Hirschman\, Micron Professor&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCx
 SpLast&quot; style=&quot;margin: 0in\; margin-bottom: .0001pt\; mso-add-space: auto\
 ; line-height: normal\;&quot;&gt;&lt;br&gt;10:15 a.m. &amp;ldquo\;EUV Dry Resist and Process
  for 2nm Node Patterning and Beyond&amp;rdquo\;\, Ben Eynon\, MicroE BS &amp;rsquo
 \;87\, Lam Research&lt;br&gt;10:45 am &amp;ldquo\;An Exploration of SiC Top-Down Mic
 rofabrication Methods&amp;rdquo\;\, Laura Armellino\, Senior MicroE &amp;lsquo\;24
 &lt;br&gt;11:05 a.m. &quot; Germanium Detectors for the Infrared Spectrum&amp;rdquo\;\, C
 eili Lipp\, Senior MicroE &amp;lsquo\;24 24&lt;br&gt;11:25 a.m. &amp;ldquo\;Analysis of 
 performance of IGZO TFTs&amp;rdquo\;\, Alex Moore\, Senior MicroE &amp;lsquo\;24&lt;b
 r&gt;11:45 a.m. LUNCH&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin:
  0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-height: normal\
 ;&quot;&gt;&lt;br&gt;&lt;strong&gt;Afternoon Session PM-1&lt;/strong&gt;&lt;br&gt;&lt;strong&gt;Session Chair: &lt;
 /strong&gt;Sean Rommel\, Professor&lt;br&gt;1:00 p.m. Upwards Remarks\, Parsian Moh
 seni\, Associate Professor&lt;br&gt;1:05 p.m. &amp;ldquo\;Critical Dimension Uniform
 ity - Every Angstrom Counts&amp;rdquo\;\, Mycahya Eggleston\, BS MicroE &amp;rsquo
 \;17\, Senior Engineer\, Critical Dimension Uniformity\, Micron Technology
 &lt;br&gt;1:35 p.m. &amp;ldquo\;Cleanroom MES and SPC Systems Design and Implementat
 ion&amp;rdquo\;\, Carl Kulesza\, Senior MicroE &amp;lsquo\;24&lt;br&gt;1:55 p.m. &amp;ldquo\
 ;Radiation Hardening of a III-V Solar Cell Via Graded Doping&amp;rdquo\;\, Kat
 elynn Blank\, Senior MicroE &amp;lsquo\;24&lt;br&gt;2:15 p.m. BREAK&lt;/p&gt;\n&lt;p class=&quot;M
 soListParagraphCxSpLast&quot; style=&quot;margin: 0in\; margin-bottom: .0001pt\; mso
 -add-space: auto\; line-height: normal\;&quot;&gt;&lt;br&gt;&lt;strong&gt;Afternoon Session PM
 -2&lt;/strong&gt;&lt;br&gt;&lt;strong&gt;Session Chair:&lt;/strong&gt; Michael Jackson\, Associate
  Professor&lt;br&gt;2:30 p.m. &amp;ldquo\;The Importance of Actually Teaching CMOS M
 anufacturing in a University Lab Setting&amp;rdquo\;\, Dr. Lynn Fuller\, RIT P
 rofessor Emeritus&lt;/p&gt;\n&lt;p class=&quot;MsoListParagraphCxSpLast&quot; style=&quot;margin: 
 0in\; margin-bottom: .0001pt\; mso-add-space: auto\; line-height: normal\;
 &quot;&gt;3:00 p.m. &amp;ldquo\;Development of a Dry Etching Process for Germanium&amp;rdq
 uo\;\, Dylan Bruno\, Senior MicroE &amp;lsquo\;24&lt;br&gt;3:20 p.m. &amp;ldquo\;Thin Fi
 lm Optical Filter for Astronomical Applications&amp;rdquo\;\, Tucker Dunham\, 
 Senior MicroE &amp;rsquo\;24&lt;br&gt;3:40 p.m. Technical Session Closing Remarks - 
 Dr. Sean Rommel&lt;/p&gt;
END:VEVENT
END:VCALENDAR

