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DTSTART;TZID=America/New_York:20240708T150000
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DESCRIPTION:Joint Technical Seminar of Tallahassee IEEE PES Chapter\,\n\nFA
 MU-FSU College of Engineering\, and\n\nThe Center for Advanced Power Syste
 ms\n\nTitle: RF Energy transfer and cryogenic thermal management technolog
 y developments at Sencera Energy\n\nPresenter: Rusty Jewett\, Ph.D. is the
  founder of Sencera Energy\n\nTime: 15:00 - 16:00\, Monday\, July 8\, 2024
 \n\nLocation: Room 120\, Center for Advanced Power Systems\n\nRefreshments
  will be served.\n\nAbstract\n\nPlasma excitation systems for semiconducto
 r processing were initially adapted from the radio broadcasting industry\,
  and even today the power architecture retains many vestigial features tha
 t are no longer required. A review of the physical mechanisms for transfer
 ring RF energy into a plasma gives insight into more efficient approaches 
 for power delivery\, which also expand process range and improve process r
 epeatability. Power density in the latest generation of process tools also
  demands better solutions for removing heat. Some alternate thermal manage
 ment approaches using cryogenic hardware will be discussed.\n\nSpeaker(s):
  Dr. Rusty Jewett\, \n\nRoom: 255 (CAPS second floor)\, Bldg: BLDG A\, 200
 0 Levy Ave\, Tallahassee\, Florida\, United States\, 32310
LOCATION:Room: 255 (CAPS second floor)\, Bldg: BLDG A\, 2000 Levy Ave\, Tal
 lahassee\, Florida\, United States\, 32310
ORGANIZER:ckim@caps.fsu.edu
SEQUENCE:12
SUMMARY:RF Energy transfer and cryogenic thermal management technology deve
 lopments at Sencera Energy
URL;VALUE=URI:https://events.vtools.ieee.org/m/426473
X-ALT-DESC:Description: &lt;br /&gt;&lt;p class=&quot;MsoNormal&quot; style=&quot;text-indent: .5in
 \;&quot;&gt;&lt;strong&gt;&lt;span style=&quot;font-size: 12.0pt\; line-height: 107%\;&quot;&gt;Joint Te
 chnical Seminar of Tallahassee IEEE PES Chapter\,&lt;/span&gt;&lt;/strong&gt;&lt;/p&gt;\n&lt;p 
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 ng&gt;&lt;span style=&quot;font-size: 12.0pt\; line-height: 107%\;&quot;&gt;The Center for Ad
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 mecolor: text1\; mso-bidi-font-style: italic\;&quot;&gt;Title&lt;/span&gt;&lt;/u&gt;&lt;/strong&gt;&lt;
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  cryogenic thermal management technology developments at Sencera Energy&lt;/s
 pan&gt;&lt;/strong&gt;&lt;/p&gt;\n&lt;p class=&quot;MsoNormal&quot;&gt;&lt;strong style=&quot;mso-bidi-font-weigh
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 nt-style: italic\;&quot;&gt;Presenter&lt;/span&gt;&lt;/u&gt;&lt;/strong&gt;&lt;strong style=&quot;mso-bidi-f
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 idi-font-style: italic\;&quot;&gt;: &lt;/span&gt;&lt;/strong&gt;&lt;span style=&quot;font-size: 12.0pt
 \; line-height: 107%\;&quot;&gt;Rusty Jewett\, Ph.D. is the founder of Sencera Ene
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 \;&quot;&gt;Refreshments will be served.&lt;/span&gt;&lt;/em&gt;&lt;/strong&gt;&lt;/p&gt;\n&lt;p class=&quot;MsoNo
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 -font-style: italic\;&quot;&gt;Abstract&lt;/span&gt;&lt;/u&gt;&lt;/strong&gt;&lt;/p&gt;\n&lt;p class=&quot;MsoNorm
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 align: justify\;&quot;&gt;&lt;span style=&quot;font-size: 12.0pt\; line-height: 107%\;&quot;&gt;Pl
 asma excitation systems for semiconductor processing were initially adapte
 d from the radio broadcasting industry\, and even today the power architec
 ture retains many vestigial features that are no longer required. A review
  of the physical mechanisms for transferring RF energy into a plasma gives
  insight into more efficient approaches for power delivery\, which also ex
 pand process range and improve process repeatability. Power density in the
  latest generation of process tools also demands better solutions for remo
 ving heat. Some alternate thermal management approaches using cryogenic ha
 rdware will be discussed.&lt;/span&gt;&lt;/p&gt;
END:VEVENT
END:VCALENDAR