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DTSTAMP:20250319T225521Z
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DTSTART;TZID=America/Los_Angeles:20250319T123000
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DESCRIPTION:Micro electro-mechanical systems (MEMS) technology has been app
 lied to various fields and created many innovative devices. Among them\, i
 n this presentation\, we focus on RFMEMS devices\, which are RF devices fa
 bricated based on MEMS technology. Novel RF MEMS devices not only passive 
 devices but also active devices have been proposed and paid attention due 
 to their superior characteristics. Commercialization of RF MEMS devices is
  slower than what we expect\, because it has reliability issues caused by 
 a moving part or fabrication process is complex. However\, RF MEMS devices
  are promising and future possibilities of MEMS technology application to 
 RF field are still opened.\n\nIn the presentation\, we introduce RF MEMS d
 evice fabrication technology based on bulk micromachining which has dielec
 tric-air-metal (DAM) structure. Moreover\, we also introduce our surface m
 icromachining based RF MEMS devices. We also discuss prospect of 3D printi
 ng technology based RF MEMS devices\, which is a wide-spread and versatile
  fabrication tool at present.\n\nSpeaker(s): Sang-Seok\, \n\nRoom: 4016\, 
 Bldg: SRYE\, 10285 University Dr\, Simon Fraser University-Surrey\, Surrey
 \, British Columbia\, Canada\, V3T 0N1\, Virtual: https://events.vtools.ie
 ee.org/m/474817
LOCATION:Room: 4016\, Bldg: SRYE\, 10285 University Dr\, Simon Fraser Unive
 rsity-Surrey\, Surrey\, British Columbia\, Canada\, V3T 0N1\, Virtual: htt
 ps://events.vtools.ieee.org/m/474817
ORGANIZER:behraad@ieee.org
SEQUENCE:57
SUMMARY:Fabrication Technologies for RFMEMS Devices
URL;VALUE=URI:https://events.vtools.ieee.org/m/474817
X-ALT-DESC:Description: <br /><p>Micro electro-mechanical systems (MEMS) te
 chnology has been applied to various fields and created many innovative de
 vices. Among them\, in this presentation\, we focus on RFMEMS devices\, wh
 ich are RF devices fabricated based on MEMS technology. Novel RF MEMS devi
 ces not only passive devices but also active devices have been proposed an
 d paid attention due to their superior characteristics. Commercialization 
 of RF MEMS devices is slower than what we expect\, because it has reliabil
 ity issues caused by a moving part or fabrication process is complex. Howe
 ver\, RF MEMS devices are promising and future possibilities of MEMS techn
 ology application to RF field are still opened.</p>\n<p><br>In the present
 ation\, we introduce RF MEMS device fabrication technology based on bulk m
 icromachining which has dielectric-air-metal (DAM) structure. Moreover\, w
 e also introduce our surface micromachining based RF MEMS devices. We also
  discuss prospect of 3D printing technology based RF MEMS devices\, which 
 is a wide-spread and versatile fabrication tool at present.</p>
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