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DTSTART:20260308T030000
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DTSTART:20261101T010000
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DTSTAMP:20260626T162655Z
UID:C1EF8B88-2632-486A-B481-459DC0416DE8
DTSTART;TZID=America/Los_Angeles:20260806T160000
DTEND;TZID=America/Los_Angeles:20260806T170000
DESCRIPTION:[]\n\nAs AI\, high-performance computing\, and heterogeneous in
 tegration continue to scale\, advanced packaging is facing growing interco
 nnect challenges across redistribution layers\, IC substrates\, HDI boards
 \, silicon vias\, and emerging glass-core platforms. Higher bandwidth and 
 larger package form factors require finer wiring\, smaller vias\, higher f
 an-out density\, and more reliable vertical interconnects. In this context
 \, copper seed formation and via metallization are becoming increasingly i
 mportant bottlenecks for next-generation package and substrate scaling.\nC
 onventional copper deposition technologies\, including physical vapor depo
 sition\, electroless plating\, and electroplating\, each play essential ro
 les in today’s manufacturing flows. However\, as via structures become s
 maller\, deeper\, rougher\, or higher in aspect ratio\, limitations such a
 s step coverage\, liquid circulation\, process uniformity\, and seed-layer
  continuity become more difficult to manage. These challenges are especial
 ly relevant across multiple interconnect layers\, including motherboard HD
 I PCBs\, IC substrates\, RDL\, memory and interposer silicon vias\, and Si
  BEOL metal\, etc.\nThis presentation will introduce Nano Copper Depositio
 n as a solution family for AI-era interconnect scaling. The talk will cove
 r DeepVia™ HDI for high-aspect-ratio via metallization in motherboard HD
 I PCBs\, DS-SAP™ for resolving the trade-off between thin surface seed l
 ayers and robust via coverage in IC substrates\, and other applications su
 ch as Dual Seed Damascene for fine and high-aspect-ratio damascene structu
 res in BEOL and RDL applications\, and DeepVia™ Silicon for memory and i
 nterposer silicon vias. The discussion will highlight how these approaches
  can support higher I/O density\, improved escape routing\, reduced layer-
 count dependency\, and broader process flexibility for next-generation adv
 anced packaging.\n\nSpeaker(s): Shinya Shimizu\, \n\nVirtual: https://even
 ts.vtools.ieee.org/m/565310
LOCATION:Virtual: https://events.vtools.ieee.org/m/565310
ORGANIZER:p.wesling@ieee.org
SEQUENCE:0
SUMMARY:Dual Seed Semi-Additive and Damascene Processes: Enabling Fine-Pitc
 h Interconnects for Advanced Packaging
URL;VALUE=URI:https://events.vtools.ieee.org/m/565310
X-ALT-DESC:Description: &lt;br /&gt;&lt;p&gt;&lt;img style=&quot;float: right\;&quot; src=&quot;https://e
 vents.vtools.ieee.org/vtools_ui/media/display/4b6cfa83-508f-46c4-ad91-55b6
 05d869d0&quot; alt=&quot;&quot; width=&quot;468&quot; height=&quot;234&quot;&gt;&lt;/p&gt;\n&lt;p&gt;&amp;nbsp\; &amp;nbsp\; &amp;nbsp\;
 As AI\, high-performance computing\, and heterogeneous integration continu
 e to scale\, advanced packaging is facing growing interconnect challenges 
 across redistribution layers\, IC substrates\, HDI boards\, silicon vias\,
  and emerging glass-core platforms. Higher bandwidth and larger package fo
 rm factors require finer wiring\, smaller vias\, higher fan-out density\, 
 and more reliable vertical interconnects. In this context\, copper seed fo
 rmation and via metallization are becoming increasingly important bottlene
 cks for next-generation package and substrate scaling.&lt;br&gt;&amp;nbsp\; &amp;nbsp\; 
 &amp;nbsp\;Conventional copper deposition technologies\, including physical va
 por deposition\, electroless plating\, and electroplating\, each play esse
 ntial roles in today&amp;rsquo\;s manufacturing flows. However\, as via struct
 ures become smaller\, deeper\, rougher\, or higher in aspect ratio\, limit
 ations such as step coverage\, liquid circulation\, process uniformity\, a
 nd seed-layer continuity become more difficult to manage. These challenges
  are especially relevant across multiple interconnect layers\, including m
 otherboard HDI PCBs\, IC substrates\, RDL\, memory and interposer silicon 
 vias\, and Si BEOL metal\, etc.&lt;br&gt;&amp;nbsp\; &amp;nbsp\; &amp;nbsp\;This presentatio
 n will introduce Nano Copper Deposition as a solution family for AI-era in
 terconnect scaling. The talk will cover DeepVia&amp;trade\; HDI for high-aspec
 t-ratio via metallization in motherboard HDI PCBs\, DS-SAP&amp;trade\; for res
 olving the trade-off between thin surface seed layers and robust via cover
 age in IC substrates\, and other applications such as Dual Seed Damascene 
 for fine and high-aspect-ratio damascene structures in BEOL and RDL applic
 ations\, and DeepVia&amp;trade\; Silicon for memory and interposer silicon via
 s. The discussion will highlight how these approaches can support higher I
 /O density\, improved escape routing\, reduced layer-count dependency\, an
 d broader process flexibility for next-generation advanced packaging.&lt;/p&gt;
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