Enhancing More-than-Moore technologies with graphene on silicon wafers
Graphene has been heralded for a while now as a material with a variety of exceptional functionalities with anticipated benefits for electronics, optics/photonics, communications, energy as well as sensing. Particularly, its atomic -thin nature makes it very appealing for integrated technologies. In addition, the capability for dynamically tuning its charge transport properties within a device, would offer a level of unprecedented versatility. Graphene technologies hold therefore vast promise as a complement to current silicon technologies.
However, despite this interest, the introduction of graphene into semiconductor technologies is not a trivial endeavour. While many of the challenges are common across the whole class of 2D materials, here we will focus on the challenges that graphene has encountered. The first one is the need for direct, consistent, and up-scalable synthesis, while the second is the need to ensure a successful fabrication at the wafer level.
We will review our unique approach to obtain epitaxial graphene on silicon substrates over large areas and in a site – selective fashion. This process is based on the use of a solid-state source of carbon - silicon carbide on silicon - combined with a liquid-phase-epitaxy growth of graphene using a catalytic alloy of nickel and copper. This technology has allowed us to reveal for the first time the electronic transport properties of epitaxial graphene on 3C-SiC on silicon over large scales, with a sheet resistance comparable to that of the more conventional epi graphene on hexagonal silicon carbide. In addition, it allowed us to demonstrate how the control of the graphene interfaces can be a more important factor than achieving large grain sizes. In fact, we suggest that, depending on the chosen application, well- engineered defects in graphene are key to achieving the wanted performance. Finally, we will show some diverse applications of this technology for integrated More than Moore functionalities, from optical metasurfaces to neural electrodes.
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- Date: 08 Apr 2022
- Time: 04:00 PM to 06:00 PM
- All times are (GMT+05:30) Asia/Calcutta
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- Karunya Nager
- Coimbatore, Tamil Nadu
- India 641114