[Legacy Report] Liquid-Phase Oxidation of Semiconductors and Device Applications

#Devices #MOS-MHEMT #MOS-PHEMT #Liquid-Ph #Liquid-Phase #Oxydation
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This talk will introduce the liquid phase oxidation on III-V materials. It will outline the application to InAlAs/InGaAs MOS-MHEMT and application to InGaP/InGaAs MOS-PHEMT. Furthermore, the talk will address how the liquid phase oxidation can be applied to device isolation and fully planarization of fabricated surfaces. The talk will present some previous works, and new results that the group is currently working on.


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  • Newark, New Jersey
  • United States
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  • Co-sponsored by AP01/MTT17

  Speakers

Prof. Kuan-Wei Lee of I-Shou University

Topic:

Liquid-Phase Oxidation of Semiconductors and Device Applications

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Address:Kaohsiung City, Taiwan