[Legacy Report] Single Chip Gas Sensor (Array) for Environmental Pollution monitoring
This talk brief about the fabrication of four element gas sensor array for monitoring air pollutants, namely CO, CO2, NO2 and SO2. The four micro-heaters share a single suspended SiO2 diaphragm, utilizing thermal proximity to achieve low power consumption (~10mW for 300oC). PECVD SiO2 diaphragm is demonstrated to give very high yield compared to thermally grown SiO2. Sensor array elements are fabricated by customizing each element to sense a specific gas, using different sensing materials. Optimized thin films of ZnO, BaTiO3-CuO doped with 1% Ag, WO3, and V2O5 are used for selective sensing of CO, CO2, NO2 and SO2. Four sensors can be independently controlled to operate at different temperatures to get high selectivity for test gases. The sensor array is packaged on Kovar header and then characterized for gas sensing. It is demonstrated that the sensors exhibit good sensitivity and selectivity. We report a maximum repeatable response to CO (~ 78.3% for 4.75 ppm), CO2 (~ 65% for 900 ppm), NO2 (~ 1948.8% for 0.9 ppm) and SO2 (~ 77% for 3 ppm) at operating temperatures of 330ºC, 298ºC, 150oC and 405ºC, respectively.
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- Newark, New Jersey
- United States
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- Co-sponsored by AP01/MTT17
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S. B. Rudraswamy of SJ College of Engineering, Mysuru, India
Single Chip Gas Sensor (Array) for Environmental Pollution monitoring
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Address:Mysuru, Karnataka, India