Precision Motion Control for Smart Micro/Nano-Positioning Systems with High Nonlinearities


IEEE Young Professionals-Montreal, PELS Chapter and CSS Chapter

METiS Talk Series

The global research in the areas of micro-robotics, high-precision control, and modern mechatronic systems is expanding. Recently, high precision positioning techniques have become widely used in several applications related to semiconductors, biomedical science, optics, haptics, and microscopy. For example, theoretical work in molecular manufacturing has highlighted the need for very small (a fraction of a nanometer) and very accurate manipulators, which simultaneously have a wide range of motion, thus permitting the flexible assembly of molecular components. This, in turn, requires a dramatic improvement in two interrelated robotic components, namely, actuators and controllers. Conventional robotic technology is already close to the limit of its performance ability, and it is difficult to expect an essential improvement in terms of accuracy and dynamic response by using the traditional actuators such as DC motors and controllers. The new level of performance can be achieved by used new smart materials such as piezoelectric and magnetostrictive actuators. Piezoelectric actuators can perform sub-nanometer moves at high frequencies because they derive their motion from solid-sate crystalline effects. Indeed, such manipulators driven by piezoelectric actuators have been commercially available, which allows us to find reliable and practical control solutions that enable the manipulators to achieve high speed and position accuracy over a wide environment range. Because the piezoelectric actuators are serving as manipulator’s actuators, the available control schemes for the conventional robotic manipulators need to be re-investigated. Specifically, the new real-world control schemes need to consider different nonlinearities of these actuators. Non-smooth nonlinearities often severely limit system performance and affect the accuracy. An important example is piezoelectric actuators, which are finding many new applications in areas demanding high precision under different conditions. The major limitation of piezoelectric actuators, however, is limited accuracy due to different nonlinearities. This motivates to conduct the fundamental research related to control of general dynamic micro -and nano-positioning systems involving nonsmooth nonlinearities. Important examples include hysteresis, backlash, and creep. These nonlinearities are very common in new industrial control systems, ranging from high technology applications such as micromanipulation in semiconductor manufacturing to traditional applications, which include electro-hydraulic positioning systems and robot manipulators. The presentation focuses on real-time solutions to enhance the performance of smart micro/nano-positioning systems with high nonlinearities in real-time systems.

  Date and Time




  • 3480 Rue University
  • Montreal, Quebec
  • Canada H3A 0E9
  • Building: McConnell Engineering Building
  • Room Number: MC603
  • Click here for Map

Staticmap?size=250x200&sensor=false&zoom=14&markers=45.5060011%2c 73
  • Co-sponsored by IEEE Montreal Section, Power Electronics Society Chapter
  • Starts 01 March 2018 08:00 AM
  • Ends 26 April 2018 01:00 PM
  • All times are Canada/Eastern
  • No Admission Charge
  • Register


<p><strong>Dr. Mohammad Al Janaideh</strong></p>

Dr. Mohammad Al Janaideh

Dr. Mohammad Al Janaideh, Assistant Professor, Mechanical Engineering at Memorial University of Newfoundland

Bio: Dr. Mohammad Al Janaideh, currently, is an Assistant Professor of Mechanical Engineering at Memorial University of Newfoundland, St. John’s, Newfoundland. He received his MASc. and Ph.D. degrees in Mechanical Engineering (mechatronics and control) from Concordia University, Montreal, in 2005 and 2010. Prior to coming to Memorial University of Newfoundland, he was a postdoctoral fellow at the University of Michigan, Ann Arbor and University of Toronto. Also, He worked as a senior Mechatronics Engineer at ASML (Advanced Semi-Conductor Manufacturing for Lithography) in Connecticut. He has more than 60 publications in the research area of precision mechatronics and controls. His research interests include precision motion control for smart micro/nano-positioning actuators. He served as the guest editor in chief for the IEEE Transactions on Mechatronics for the special issue of “Hysteresis in Smart Mechatronic Systems: Modeling, Identification, and Control”.


Refreshments will be served.

METiS : In Greek mythology, Metis was the goddess of wisdom, prudence and deep thought.