Speaker: Prof. Tayfun Akın, Middle East Technical University

Topic: "METU-MEMS Center"

Location: Middle East Technical University, Ankara, Turkey

Abstract:  The first MEMS program in Turkey started its activities in 1995 at METU, leading to the first MEMS Center of Turkey. The METU-MEMS Center has a 1300 m2 cleanroom area with the state-of-the-art MEMS fabrication tools with 4", 6", and 8" wafer processing capability, thanks to the $65M national and international research funds, mostly raised in the past 10 years. METU MEMS Center has recently become one of the first 4 national centers of Turkey. The talk will introduce METU-MEMS Center, along with its research activities, summarizing the research achievements of the selected subjects, including low-cost CMOS based microbolometers that attracted VC funding to set up a spin-off company, gyroscopes showing performances below 1degree/hour, accelerometers showing performances below 10ug with above 130dB dynamic range, RF MEMS switches operating above 12 billion cycles, innovative and patented BioMEMS devices for cancer cell detection and for cochlear implants. The talk will also introduce two current spin-off/start-up companies from METU working on infrared detectors and readout electronics, namely Mikrosens and Mikro-Tasarim. Mikrosens is a fabless semiconductor company, developing ultra-low-cost infrared detectors with only one-mask post-CMOS process. Mikro-Tasarim is also a fabless semiconductor company, developing ROICs and their driver/digitizer ASICs for hybrid/monolithic, cooled/uncooled detectors in UV, Visible, NIR, SWIR, MWIR, and LWIR wavelengths.

Bio:  Prof. Dr. Tayfun Akin received B.S. degree in electrical and electronics eng with high honors from Middle East Tech. Univ. (METU) Ankara, Turkey, in 1987 and went to USA for his graduate studies with a fellowship provided by NATO Science Scholarship Program through TUBITAK. He received M.S. and Ph.D. degrees in 1989 and 1994 in electrical eng., from Univ. of Michigan, Ann Arbor. He returned to Turkey in 1995 to start the country’s first MicroElectroMechanical Systems (MEMS) program. He became Asst. Prof. in 1995, Assoc. Prof. in 1998, and Prof. in 2004 in Dept. of Electrical and Electronics Eng. at METU. He served as the Chair of METU Micro and Nanotechnology Graduate Program for 3 years. He is the Director of the METU-MEMS Center, which has a vision of not only conducting state-of-the-art research on MEMS, but also establishing a high tech industry based on the MEMS technology.  He raised and managed over 65M USD funding for several national and international projects, including EU (FP6, FP7, Horizon2020), NATO, and NSF-USA funded projects. He has served in various MEMS, EUROSENSORS, TRANSDUCERS, and SPIE conferences as a committee member. He received a number of national and international awards. He was the co-chair of IEEE MEMS Conf. held in Istanbul in 2006. He is the winner of the First Prize in Experienced Analog/Digital Mixed-Signal Design Category at 1994 Student VLSI Circuit Design Contest organized by Mentor Graphics, Texas Instruments, Hewlett-Packard, Sun Microsystems, and Electronic Design Magazine. He has a total of over 200 international journal and conference publications. He is also co-founder of six start-up companies, namely Mikro-Tasarim, MikroSens, Pikselim, Mikro BiyoSistemler, Mikrosistemler, and AREF Sens.

  Date and Time




  • Ankara, Ankara
  • Turkey

  • Co-sponsored by URSI-TR


Prof. Tayfun Akin