SMC Seminar on Scheduling Robotic Cells with Multiple Objectives

#Scheduling #Robotic #Cells

Scheduling Robotic Cells with Multiple Objectives

QingHua Zhu, Ph.D. & Associate Professor

Guangdong University of Technology, Guangzhou, China

Time: 2pm, Feb. 27, 2018

Place: ECEC 202, NJIT

Abstract: Robotic cells are widely used to fabricate wafers in semiconductor manufacturing. Recently, due to cutting-edge nanomaterial technology, some wafer fabrication processes require more accurate and complex chemical reactions, which indicates that the shorter time a wafer stays in a processing chamber after it is finished processing, the better quality of devices on a wafer could be obtained. During the wafer fabrication, in order to ensure high-quality fabricated wafers, it is desired that wafer sojourn time be reduced even though wafer residency time constraints are satisfied. In the meanwhile, costly robotic cells have to be operated efficiently. Therefore, it is necessary to maximize the throughput of robotic cells and minimize wafer sojourn time. This talk intends to discuss this two objective scheduling problem which has never reported in the literature. For single- and dual-arm robotic cells respectively, we will first examine schedulability conditions based on workload properties among a robot and processing modules. Then, we analyze robot waiting event’s impact on wafer sojourn time and propose efficient algorithms to realize these two scheduling objectives.

Biography: QingHua Zhu (SM’17) gained the Ph.D. degree in industrial engineering from Guangdong University of Technology, Guangzhou, China, in 2013. Currently he is an associate professor with the School of Computer Science and Technology, Guangdong University of Technology, China, and also a visiting scholar with the Department of Electrical and Computer Engineering, New Jersey Institute of Technology (NJIT), NJ, USA, since September 2017. He was a visiting scholar at NJIT from 2014 to 2015. He is a Senior Member of the IEEE. His research interests include discrete event systems, production scheduling and optimization, and Petri nets. He has authored or coauthored over 20 papers published in academic journals and conferences, such as the IEEE Transactions on Semiconductor Manufacturing, the IEEE Transactions on Systems, Man, and Cybernetics: Systems, Computers & Operation Research, and the IEEE International Conference on Robotics and Automation. He serves as a reviewer for some international journals and conferences.

• Add Event to Calendar
  iCal
  Google Calendar

• 323 BLK Blvd
• Newark, New Jersey
• United States 07102-1982

---

• Contact Event Host

• Starts 30 January 2018 10:20 PM UTC
• Ends 26 February 2018 10:20 PM UTC
• No Admission Charge

•