25 October 2019 (12:40):  IEEE AP/MTT/EMC/ED Turkey Seminar Series (S.55)

Speaker: Asst. Prof. Erdinç Tatar, UNAM, Bilkent University

Topic: "Finding Solutions to the MEMS Gyroscope Drift Problem"

Location: Middle East Technical University, Ankara, Turkey

Abstract:  In this talk, I will mainly focus on my PhD research in Carnegie Mellon University and extending my PhD work on sensor drift suppression.  One major performance limiting problem that is common among most of the sensors is the drift.  Environmental stress and temperature effects are believed to be the major source of the drift and the latter is studied the most in the literature.  Certain enhancements are achieved but the sensor drift cannot be removed completely by temperature compensation.  My PhD thesis successfully addressed the drift problem for gyroscopes by incorporating the stress sensor and the gyroscope on the same die for the first time.  Through ovenization my research demonstrated that stress compensation suppresses the long term drift by seven fold.  Since stress compensation achieved promising results, I would like to extend this work by designing better on-chip stress sensors, investigating the die stress with different die attaches and die mount techniques, and applying stress compensation to a circular gyroscope.

High drive displacement improves the signal to noise ratio of a resonator but also leads to a nonlinear force displacement behavior that is observable as a hysteresis in the frequency-phase and frequency-amplitude relations.  My thesis proposed a cubically shaped nonlinearity tuning comb finger design that cancels the inherent softening nonlinearity of the gyroscope drive mode by introducing a DC voltage controlled hardening nonlinearity.  The functionality of the fingers was demonstrated and cancelling drive nonlinearities resulted in a better bias instability compared to the high displacement with nonlinear characteristics.

Finally, I will conclude my talk with my near term research interests that include designing a better stress compensated gyroscope and developing acoustic resonance gas sensors.

Bio: Erdinc Tatar was born in Denizli, Turkey.  He received B.S. and M.S. degrees (with high honors) in Electrical and Electronics Engineering from Middle East Technical University (METU), Ankara, Turkey, and Ph.D. degree in Electrical and Computer engineering from Carnegie Mellon University, Pittsburgh, PA, in 2008, 2010, and 2016 respectively.  He was a Graduate Research Assistant with Micro-Electro-Mechanical Systems Research and Applications Center, METU, and with Carnegie Mellon University from 2008 to 2011, and 2012 to 2016, respectively.  From 2016 to 2019 he worked as a MEMS Design Engineer responsible for the development of next generation gyroscopes in Analog Devices, Inc., Wilmington, MA.  Currently he is an assistant professor with the Department of Electrical and Electronics Engineering and UNAM in Bilkent University.  His research interests include MEMS sensors (specifically Inertial and Gas sensors), microfabrication and packaging technologies, and readout and control electronics for MEMS sensors.  Dr. Tatar has authored multiple IEEE journal and conference papers.  He also serves as a reviewer for major MEMS journals such as Journal of Micromechanics and Microengineering and IEEE Sensors.

  Date and Time




  • Ankara, Ankara
  • Turkey



Asst. Prof. Erdinç Tatar


Finding Solutions to the MEMS Gyroscope Drift Problem