Photonic MEMS inertial sensors: challenges and opportunities

#sensor #inertial #optical #mems

Virtual presentation by Dr. Ying Lia Li, CEO and Founder of Zero Point Motion 


Significant enhancements in inertial sensor performance can be obtained by combining high volume compatible mechanical structures from the micro-electro-mechanical systems (MEMS) industry with silicon photonic microresonators. Although noise floors 100-1,000x lower than typical consumer grade MEMS accelerometer and gyroscopes can be achieved, new challenges arise with integration of light sources including requirements on driving and controlling photonic elements. In this talk I will give an overview of Zero Point Motion’s approach to combining photonic integrated circuit (PIC) microresonators with MEMS. I outline how chipscale devices like LIDAR and optical transceivers approach the integration challenge, new developments in ASIC design to aid control, and how Zero Point Motion is adapting these methods for the inertial sensing market.  

  Date and Time




  • Date: 30 Aug 2023
  • Time: 11:45 AM to 01:00 PM
  • All times are (UTC-07:00) Pacific Time (US & Canada)
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  • Contact Event Host
  • Jeronimo Segovia-Fernandez

    IEEE SFBA MEMS & Sensors Chapter, Chair 

  • Starts 05 August 2023 11:51 AM
  • Ends 30 August 2023 11:45 AM
  • All times are (UTC-07:00) Pacific Time (US & Canada)
  • No Admission Charge
  • Menu: IEEE Member, Non-IEEE Member


Dr. Ying Lia Li Dr. Ying Lia Li


Dr. Ying Lia Li (Lia) is the CEO and Founder of Zero Point Motion (ZPM), an early stage startup creating chipscale optical inertial sensors. Lia was awarded the 2021 Institute of Physics Clifford Paterson Medal and Prize and is a 2022 Innovate UK Women in Innovation Awardee. Lia founded ZPM in 2020, setting up the company in Bristol, UK, after raising £2.658m seed investment. ZPM is a fabless B2B business developing and supplying high performance inertial sensors – chip scale gyroscopes and accelerometers packaged into 6-axis inertial measurement units (IMUs). Utilising the micro-electro-mechanical systems (MEMS) supply chain used to manufacture existing chip scale inertial sensors, and exploit new developments in manufacturing chip scale photonic integrated circuits (PICs) to create IMUs with improved sensing abilities at lower noise levels than the traditional MEMS-only approach. Our vision is to create a new class of navigation devices which work everywhere, indoors or outdoors, in-hand or in-vehicle, free from the constraints of satellite-derived positioning.

Address:Bristol, United Kingdom


11:45am – Noon: Check-In & Announcements

Noon – 12:45pm: Invited Talk

12:45pm – 1pm: Questions & Answers