Compact Modeling of a CMOS MEMS Convective Accelerometer and developed CMOS electronics
The seminar starts with an overview of and steps for the compact analytical/numerical modeling which can be applied for any MEMS sensor. This approach is then applied to a new design of CMOS MEMS 3-axis convective accelerometer. To predict the response of a convective microaccelerometer, or inversely, to design a specific sensor for a given sensitivity, it is necessary to accurately describe the relation between sensor sensitivity and both design and operation parameters. Two approaches are generally used. The first one consists in a mathematical modeling of a simplified geometry of the accelerometer. The second approach consists in numerical simulations based on Finite Element Model (FEM) analysis to accurately determine a sensor's performance. To get the best of the above, compact analytical models calibrated with respect to FEM simulations are developed to quickly calculate sensitivities of any possible design of a convective microaccelerometer. The developed CMOS conditioning electronics for the sensor is also explained and the layout and fabricated prototype are detailed.
This seminar then gives an overview of the activities organized by the SSCS Tunisia Chapter and details future possible joint activities which are of most interest to Tunisia members. These are then discussed to explore and further identify adapted future joint activities benefitting members and non-members. This should help increasing the number of Tunisia and South Korea SSCS membership count.
Date and Time
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Registration
- Date: 13 May 2024
- Time: 10:00 AM to 11:00 AM
- All times are (UTC+09:00) Seoul
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- Ajou University
- Suwon, Gyeonggi-do
- South Korea
- Starts 17 April 2024 12:00 AM
- Ends 05 May 2024 12:00 AM
- All times are (UTC+09:00) Seoul
- No Admission Charge