Silicon MEMS Ultrasound: Technology and Applications
Ultrasound is utilized in diverse industries such as MedTech (e.g. for imaging, therapy, photoacoustic) or measurement and analysis (e.g. flow flow rate measurement, material characterization, non-destructive testing). Conventional piezoelectric transducers have been by far primary technologies in ubiquitous applications of ultrasound. Capacitive micromachined ultrasound transducer (CMUT) is an all-silicon ultrasound technology that emerges as an attractive alternative, and furthermore drives toward new applications. These silicon-based transducers offer not only limitless miniaturization of transducers or their batch production, but also unique advantages such as wide bandwidth (> 100 %), better impedance matching, high temperature tolerance (>200 °C), and no self-heating. This talk aims to provide an overview of the technology, from design to manufacturing, as well as a few demonstrated applications.
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- Simon Fraser University
- 8888 Univeristy Drive
- Burnaby, British Columbia
- Canada V5A 1S6
- Building: Applied Sciences Building
- Room Number: ASB 10704
Speakers
Nooshin of Fraunhofer ENAS
Biography:
Nooshin Saeidi (IEEE Senior Member) received the Ph.D. degree in electronic and electrical engineering from University College London (UCL), London, U.K. and worked as a post-doctoral fellow at UCL until 2013. She joined Fraunhofer ENAS in 2013, focusing on technology and device developments. She is currently group leader for Micro Acoustic Systems.
Email:
Address:Fraunhofer ENAS,
Nooshin of University College London
Silicon MEMS Ultrasound: Technology and Applications
Ultrasound is utilized in diverse industries such as MedTech (e.g. for imaging, therapy, photoacoustic) or measurement and analysis (e.g. flow flow rate measurement, material characterization, non-destructive testing). Conventional piezoelectric transducers have been by far primary technologies in ubiquitous applications of ultrasound. Capacitive micromachined ultrasound transducer (CMUT) is an all-silicon ultrasound technology that emerges as an attractive alternative, and furthermore drives toward new applications. These silicon-based transducers offer not only limitless miniaturization of transducers or their batch production, but also unique advantages such as wide bandwidth (> 100 %), better impedance matching, high temperature tolerance (>200 °C), and no self-heating. This talk aims to provide an overview of the technology, from design to manufacturing, as well as a few demonstrated applications.
Biography:
Nooshin Saeidi (IEEE Senior Member) received the Ph.D. degree in electronic and electrical engineering from University College London (UCL), London, U.K. and worked as a post-doctoral fellow at UCL until 2013. She joined Fraunhofer ENAS in 2013, focusing on technology and device developments. She is currently group leader for Micro Acoustic Systems.
Agenda
Ultrasound is utilized in diverse industries such as MedTech (e.g. for imaging, therapy, photoacoustic) or measurement and analysis (e.g. flow flow rate measurement, material characterization, non-destructive testing). Conventional piezoelectric transducers have been by far primary technologies in ubiquitous applications of ultrasound. Capacitive micromachined ultrasound transducer (CMUT) is an all-silicon ultrasound technology that emerges as an attractive alternative, and furthermore drives toward new applications. These silicon-based transducers offer not only limitless miniaturization of transducers or their batch production, but also unique advantages such as wide bandwidth (> 100 %), better impedance matching, high temperature tolerance (>200 °C), and no self-heating. This talk aims to provide an overview of the technology, from design to manufacturing, as well as a few demonstrated applications.