Seasonal School on microelectronic technologies for micro and nanosensor systems
A course that has an on-line format enabling remote attendance.
OBJECTIVE
This specialized seasonal school introduces attendees to the microelectronic technologies and fabrication processes available at the Institut de Microelectrònica de Barcelona (IMB-CNM, CSIC), the biggest clean room facility in Spain. This Seasonal School will follow an on-line format.
The programme emphasizes technologies relevant to micro- and nanosystems production. Participants will gain a comprehensive understanding of planar silicon-based microelectronic technologies and their role in the design and development of cutting-edge micro/nanosystem components applicable to sensing.
All lectures will be streamed, enabling an unlimited number of on-line registered attendees to follow them.
TARGET AUDIENCE
This course is tailored to the interests and expertise of Academia and Industry working on sensor systems, micro- and nano-fabrication, semiconductor devices, or related technologies. The focus will be on research-oriented application. Therefore, target audience comprises mainly:
- PhD students. Early-career researchers. Senior researchers. Technical specialists.
Date and Time
Location
Hosts
Registration
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Eduard Llobet is professor at University Rovira i Virgili, Tarragona, Spain.
- Co-sponsored by National Centre of Microelectronics and Spanish Network on Nanotechnology and Microsystems (IBERNAM)
Speakers
Miguel of IMB-CNM-CSIC
Good Practices in Clean Room facilities
Alberto of IMB-CNM-CSIIC
Implantation Technologies
Biography:
Expert in computational materials science. h = 46.
David of IMB-CNM-CSIC
Microelectronics Integration
Biography:
Head of the Clean room facility
Joan of IMB-CNM-CSIC
Introduction to microelectronics
Biography:
MEMS and NEMS expert. h = 38.
Jofre of IMB-CNM-CSIC
Reverse Engineering
Biography:
Reverse engineering expert.
Javier of IMB-CNM-CSIC
Optical lithography
Biography:
Expert in lithography
Leyre of IMB-CNM-CSIC
Physical Vapour Deposition
Biography:
Expert in thin films and metallization.
Marta of IMB-CNM-CSIC
Microsystem Technologies
Núria of IMB-CNM-CSIC
Clean ing and wet etching
Pablo of IMB-CNM-CSIC
Simulation of devices and processess
Biography:
Expert in process engineering. h = 34.
Francisco of IMB-CNM-CSIC
Cricuit design and simulation
Biography:
Expert in analig and mixed signal design and simulation. h = 20.
Sara of IMB-CNM-CSIC
Oxidation processes & Doping processes in silicon
Roser of IMB-CNM-CSIC
Dry etching
Ricard of IMB-CNM-CSIC
Chemical Vapor Deposition
Xavier of IMB-CNM-CSIC
Electron-beam lithography
Agenda
The course will be delivered over five days and will include:
- Theoretical Lessons: 15 hours distributed in 7 sessions (7x 2 hours/session + 1 specialist session)
SCHEDULE
Daily, from 9 h to 14 h.
PLACE
Theoretical sessions: Sala de Actos Pepe Millán at IMB-CNM (CSIC), Campus de la UAB, Bellaterra, Barcelona, Spain. Will be streamed and recorded.