Leveraging Semiconductor Eco-systems to MEMS - Prof. Weileun Fang (Taiwan)
Abstract: Microelectromechanical systems (MEMS) are becoming key enabling technologies for nextgeneration sensing, actuation, IoT, and ntelligent robotic systems. In this talk, Prof. Weileun Fang will present the research activities of the Micro Devices Laboratory (MDL) at National Tsing Hua University and the role of the Micro Sensors and Actuators Technology Consortium (μSAT) in fostering collaboration between academia and industry. The presentation will highlight recent advances in CMOS-MEMS and MEMS-on-CMOS technologies, including infrared, humidity, pressure, gas, and tactile sensors, as well as piezoelectric MEMS actuators such as micro-scanners and micro-speakers. Examples of successful technology transfer, foundry-based MEMS development, and system-level integration for applications ranging from environmental monitoring and LiDAR to human–machine interfaces and humanoid robotics will be discussed. The talk will demonstrate how a strong MEMS ecosystem can accelerate innovation, talent development, and commercialization, enabling the “5 Senses + AI” vision for future intelligent systems.
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- AGH University of Krakow
- Av. Mickiewicza 30
- Krakow, Malopolskie
- Poland 32-059
- Building: C2
- Room Number: 429