[Legacy Report] Petri Nets for Modeling and Scheduling of Cluster Tools

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IEEE North Jersey Section SMC Chapter Seminar
Time: 1-2pm, Friday, Dec. 6, 2013
ECE 202, New Jersey Institute of Technology
Contact: Mengchu Zhou, Ph.D. & Distinguished Professor, zhou@njit.edu
Direction: www.njit.edu (intersection between Summit St. and Warren St., Newark, NJ)

Petri Nets for Modeling and Scheduling of Cluster Tools

Dr. Chunrong Pan
Associate Professor
Department of Mechanical & Electrical Engineering
Jiangxi University of Science and Technology
Ganzhou, China


Abstract

This seminar introduces Petri nets as a powerful modeling tool of discrete event systems. Their application to modeling, control and scheduling of cluster tools in wafer fabrication is stressed. A wafer’s diameter has become bigger and bigger, such as 300mm(12inch) or 450mm(18inch). More and more wafer fabrication processes such as lithography, etching, and deposition, have been performed by the process modules in cluster tools. Cluster tools are the most important automated equipment in wafer fabrication. Their efficient control and scheduling is an important research area. This talk will reveal some recent progress in this area. It will offer some efficient algorithms to achieve the optimal steady schedules that are easy to implement.

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