Petri Net Modeling and Scheduling of Multi-cluster Tools in Wafer Fabrication
IEEE Northern Jersey Section SMC and CS Chapter
Petri Net Modeling and Scheduling of Multi-cluster Tools in Wafer Fabrication
QingHua Zhu, Ph.D. and Associate Professor
Guangdong University of Technology
Guangzhou, China,
Time: 2pm, September 17, 2015
Place: ECE 202
Abstract:The silicon wafers are used to fabricate integrated circuit chips. Multi-cluster tools are widely adopted as wafer fabrication equipment. Several cluster tools are connected together by sharing buffer modules to form a multi-cluster tool system to improve the productivity of wafer fabrication. Multiple robots and processing modules perform their operations concurrently. They bring about great challenge to schedule the system optimally. The fabrication for one type of wafer goes through three processes: start-up, steady-state, and close-down. This talk intends to clarify that Petri nets can play an important role in the optimal scheduling of multi-cluster tools. We will first examine how to model the system with Petri nets. The semiconductor industry always prefers a schedule with excellent performance and easy implementation. Then we will show how to establish schedulability conditions and find such a one-wafer schedule for a multi-cluster tool in the steady-state process. New trends of product customization, circuit width reduction and larger wafer size lead to smaller size of wafer lots. Thus, more start-up and close-down transient processes emerge frequently between the lots switchings. We will show how to shorten these transient periods, which is economically significant to the wafer fab. At last, we will point out some future research issues.
Biography: QingHua Zhu(M’15)gained the Ph.D. degree in industrial engineering from Guangdong University of Technology, Guangzhou, China, in 2013. Currently he is an assistant professor with the School of Computer Science and Technology, Guangdong University of Technology, China, and also a visiting scholar with the Department of Electronics and Computer Engineering, New Jersey Institute of Technology, NJ, USA, since October 2014. He is a member of the IEEE and ACM. His research interests include discrete event systems, production planning, scheduling and control, and Petri nets. He has authored or coauthored over 10 papers published in academic journals and conferences, such as the IEEE Transactions on Semiconductor Manufacturing, Computers & Operation Research, and the IEEE International Conference on Robotics and Automation. He serves as a reviewer for some international journals and conferences.
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- Newark, New Jersey
- United States
- Starts 08 September 2015 05:00 PM UTC
- Ends 16 September 2015 05:00 PM UTC
- No Admission Charge
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Time: 2pm, September 17, 2015 Seminar
Place: ECE 202