Silicon MEMS Pressure Sensors
Pressure sensors are the earliest commercially successful MEMS sensors and bring out many aspects of the success of MEMS technology. Starting with the standard pressure sensors with bulk micromachined silicon membranes and polycrystalline silicon piezoresistors, we introduce modifications in materials as well as the design to improve the sensitivity and range. Low pressure sensors made from silicon, based on Knudsen’s forces, will also be discussed. Knudsen’s forces are gas molecular forces originating due to differential temperatures in rarefied gases and can be used to measure absolute pressure using microfabricated structures. The fabricated gauge had a sensitivity of 100 fF/Pa and a resolution of 10% in the pressure range 0.1 to 10 Pa. Modifications are underway to expand the range and improve the sensitivity.
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- Date: 10 Feb 2021
- Time: 03:00 PM to 04:30 PM
- All times are (UTC+11:00) Sydney
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- Sydney, New South Wales
- Australia 2109
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- Co-sponsored by Prof. Subhas Mukhopadhyay
Speakers
Prof. Enakshi Bhattacharya of IIT Madras, Chennai
Silicon MEMS Pressure Sensors
Pressure sensors are the earliest commercially successful MEMS sensors and bring out many aspects of the success of MEMS technology. Starting with the standard pressure sensors with bulk micromachined silicon membranes and polycrystalline silicon piezoresistors, we introduce modifications in materials as well as the design to improve the sensitivity and range. Low pressure sensors made from silicon, based on Knudsen’s forces, will also be discussed. Knudsen’s forces are gas molecular forces originating due to differential temperatures in rarefied gases and can be used to measure absolute pressure using microfabricated structures. The fabricated gauge had a sensitivity of 100 fF/Pa and a resolution of 10% in the pressure range 0.1 to 10 Pa. Modifications are underway to expand the range and improve the sensitivity.