Silicon MEMS Pressure Sensors

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Pressure sensors are the earliest commercially successful MEMS sensors and bring out many aspects of the success of MEMS technology. Starting with the standard pressure sensors with bulk micromachined silicon membranes and polycrystalline silicon piezoresistors, we introduce modifications in materials as well as the design to improve the sensitivity and range. Low pressure sensors made from silicon, based on Knudsen’s forces, will also be discussed. Knudsen’s forces are gas molecular forces originating due to differential temperatures in rarefied gases and can be used to measure absolute pressure using microfabricated structures. The fabricated gauge had a sensitivity of 100 fF/Pa and a resolution of 10% in the pressure range 0.1 to 10 Pa. Modifications are underway to expand the range and improve the sensitivity.



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    Meeting ID: 870 7153 3097

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  • Sydney, New South Wales
  • Australia 2109

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  • Co-sponsored by Prof. Subhas Mukhopadhyay


  Speakers

Prof. Enakshi Bhattacharya of IIT Madras, Chennai

Topic:

Silicon MEMS Pressure Sensors

Pressure sensors are the earliest commercially successful MEMS sensors and bring out many aspects of the success of MEMS technology. Starting with the standard pressure sensors with bulk micromachined silicon membranes and polycrystalline silicon piezoresistors, we introduce modifications in materials as well as the design to improve the sensitivity and range. Low pressure sensors made from silicon, based on Knudsen’s forces, will also be discussed. Knudsen’s forces are gas molecular forces originating due to differential temperatures in rarefied gases and can be used to measure absolute pressure using microfabricated structures. The fabricated gauge had a sensitivity of 100 fF/Pa and a resolution of 10% in the pressure range 0.1 to 10 Pa. Modifications are underway to expand the range and improve the sensitivity.