IEEE EDS, 7th Electron Devices Technology and Manufacturing Conference (EDTM 2023) Report Session
In this event, we invite EDTM subcommittee members and report the highlight papers and technical trends of EDTM 2023.
(https://ewh.ieee.org/conf/edtm/2023/)
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- Tokyo Institute of Technologies, Ookayama Campus
- 2-12-1, Ookayama
- Meguro, Tokyo
- Japan 152-8550
- Building: Ishikawadai Bldg. 1
- Room Number: 7F 754
- Click here for Map
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- Co-sponsored by EDTM 2023 Committee, IEEE EDS Kansai Chapter
Agenda
11:00-11:02 Opening / Kazunari Ishimaru (Rapidus)
11:02-11:15 Overview / HItoshi Wakabayashi (Tokyo Institute of Technology)
11:15-11:30 Power and Energy Devices / Wataru Saito (Kyushu University)
11:30-11:45 Process, Tools, Yield, and Manufacturing / Makoto Miura (Hitachi High-Technologies)
11:45-12:00 Papers in Process, Tools, Yield, and Manufacturing / Yoshiki Yamamoto (Renesas)
12:00-12:15 Nanotechnologies / Kim Myeongok (The University of Tokyo)
12:15-12:30 Semiconductor Devices / Kuniyuki Kakushima (Tokyo Institute of Technology)
12:30-12:35 Closing / Masumi Saitoh (KIOXIA)