Unleashing the Power of Mechanics on CMOS: Hafnia Nanoelectromechanical Systems For RF Frequency Control

#nems #resonators #ferroelectrics #piezoelectricity #filters #timing
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Virtual presentation by Prof. Roozbeh Tabrizian from University of Florida

Abstract:

Access to nanoscale piezoelectric transducers in advanced semiconductor processes enables realization of acoustic resonators on CMOS chips. Monolithically integrated acoustic resonators facilitate the creation of on-chip clocks, local oscillators, and filters with improved performance, size, and cost.

The discovery of ferroelectricity in fluorite-structured oxides, such as hafnia and zirconia, has augured the emergence of the long-coveted CMOS piezoelectric transducer. Atomic-layer-deposited hafnia-zirconia are already used, in amorphous form, as high-k dielectrics in advanced semiconductor nodes. Once subjected to proper atomic engineering, these fluorites can take polar crystalline forms with large piezoelectric coupling that enables creation of high-performance acoustic resonators.

In this talk, I will present an overview on CMOS-based fluorite ferroelectrics and their properties pertained to nanoelectromechanical systems (NEMS) resonator performance merits. I will introduce our efforts on (1) developing hafnia-zirconia piezoelectric transducers for creation of super-high-frequency NEMS resonators with high electromechanical-coupling and quality-factor, and intrinsic switchability, (2) development of three-dimensional acoustic resonator technology based on integrating hafnia-zirconia on semiconductor fins, enabling massive integration of multi-band filter arrays and wideband switch-free multiplexers, and (3) development of ultra-stable oscillators using temperature-compensated hafnia-zirconia resonators.


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  • Date: 31 Jan 2024
  • Time: 06:30 PM to 08:00 PM
  • All times are (UTC-08:00) Pacific Time (US & Canada)
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  • Contact Event Host

  • Jeronimo Segovia-Fernandez

    Chair, IEEE MEMS & Sensors SFBA Chapter

    http://sites.ieee.org/scv-mems/ 

  • Starts 15 January 2024 08:23 PM
  • Ends 31 January 2024 06:30 PM
  • All times are (UTC-08:00) Pacific Time (US & Canada)
  • No Admission Charge
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  Speakers

Prof. Roozbeh Tabrizian Prof. Roozbeh Tabrizian

Biography:

Roozbeh Tabrizian is an Associate Professor and the NELMS Rising Star Endowed Professor at the Department of Electrical and Computer Engineering, University of Florida. He received his B.S. (2007) degree in Electrical Engineering from Sharif University of Technology, Iran, and the Ph.D. (2013) degree in Electrical and Computer Engineering from the Georgia Institute of Technology. He was a Post-Doctoral Scholar (2014-2015) at the University of Michigan. His research interests include RF micro- and nano-electro-mechanical systems (M/NEMS); microwave acoustics; novel ferroic materials; and  M/NEMS frequency references and clocks. Tabrizian has received the DARPA Director's Fellowship Award (2021), a DARPA Young Faculty Award (2019), and an NSF CAREER Award (2018). He is an Associate Editor of the IEEE Journal of Microelectromechanical Systems (JMEMS) and Sensors and Actuators A: Physical. Tabrizian's research has resulted in more than 80 journal and refereed conference papers and 10 patents. Tabrizian and his students are recipients of multiple outstanding paper awards at top-tier conferences such as IEEE MEMS and Transducers.




Agenda

6:30 – 6:50 PM Zoom Registration & Networking

6:50 – 7:00 PM Announcements & Polling

7:00 – 7:45 PM Invited Talk

7:45 – 8:00 PM Questions & Answers