RF Energy transfer and cryogenic thermal management technology developments at Sencera Energy

#RF#Energy#Thermal#Cryogenics
Share

Joint Technical Seminar of Tallahassee IEEE PES Chapter,

FAMU-FSU College of Engineering, and

The Center for Advanced Power Systems

 

Title: RF Energy transfer and cryogenic thermal management technology developments at Sencera Energy

Presenter: Rusty Jewett, Ph.D. is the founder of Sencera Energy

Time: 15:00 - 16:00, Monday, July 8, 2024

Location: Room 120, Center for Advanced Power Systems

 

Refreshments will be served.

 

Abstract

 

Plasma excitation systems for semiconductor processing were initially adapted from the radio broadcasting industry, and even today the power architecture retains many vestigial features that are no longer required. A review of the physical mechanisms for transferring RF energy into a plasma gives insight into more efficient approaches for power delivery, which also expand process range and improve process repeatability. Power density in the latest generation of process tools also demands better solutions for removing heat. Some alternate thermal management approaches using cryogenic hardware will be discussed.



  Date and Time

  Location

  Hosts

  Registration



  • Date: 08 Jul 2024
  • Time: 03:00 PM to 04:00 PM
  • All times are (UTC-04:00) Eastern Time (US & Canada)
  • Add_To_Calendar_icon Add Event to Calendar
  • 2000 Levy Ave
  • Tallahassee, Florida
  • United States 32310
  • Building: BLDG A
  • Room Number: 255 (CAPS second floor)

  • Contact Event Hosts


  Speakers

Dr. Rusty Jewett of Sencera Energy

Topic:

RF Energy transfer and cryogenic thermal management technology developments at Sencera Energy

the founder of Sencera Energy, a company that develops power and heat transfer hardware for the semiconductor and other industries

Biography:

Dr. Rusty Jewett

 

Rusty Jewett, Ph.D. is the founder of Sencera Energy, a company that develops power and heat transfer hardware for the semiconductor and other industries. Prior to Sencera, he was the Managing Director of Power Systems for Lam Research, a leading manufacturer of semiconductor manufacturing equipment, the CEO of Sunpower, and the former CTO for Advanced Energy Industries, a manufacturer of precision power supplies and plasma sources. He has over 35 years of experience in commercial hardware development with patents spanning a wide range of physical disciplines including novel RF power delivery architectures, high-density plasma processing systems, and heat transfer mechanisms.

 

 





  Media

Dr. Jewett Seminar 07082004 175.80 KiB