Fabrication Technologies for RFMEMS Devices
Micro electro-mechanical systems (MEMS) technology has been applied to various fields and created many innovative devices. Among them, in this presentation, we focus on RFMEMS devices, which are RF devices fabricated based on MEMS technology. Novel RF MEMS devices not only passive devices but also active devices have been proposed and paid attention due to their superior characteristics. Commercialization of RF MEMS devices is slower than what we expect, because it has reliability issues caused by a moving part or fabrication process is complex. However, RF MEMS devices are promising and future possibilities of MEMS technology application to RF field are still opened.
In the presentation, we introduce RF MEMS device fabrication technology based on bulk micromachining which has dielectric-air-metal (DAM) structure. Moreover, we also introduce our surface micromachining based RF MEMS devices. We also discuss prospect of 3D printing technology based RF MEMS devices, which is a wide-spread and versatile fabrication tool at present.
Date and Time
Location
Hosts
Registration
- Date: 19 Mar 2025
- Time: 07:30 PM UTC to 08:45 PM UTC
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- 10285 University Dr
- Simon Fraser University-Surrey
- Surrey, British Columbia
- Canada V3T 0N1
- Building: SRYE
- Room Number: 4016
- Click here for Map
- Starts 14 March 2025 07:00 AM UTC
- Ends 19 March 2025 07:00 PM UTC
- 8 in-person spaces left!
- No Admission Charge
- Menu: Vegeterian
Speakers
Sang-Seok of Tottori University, Japan
Biography:
Dr. Sang-Seok Lee received the Ph.D. degree from the Graduate School of Information Sciences, Tohoku University, Japan, in 1998. From Dec. 1998 to Dec. 1999, he was a Postdoctoral Researcher with the Venture Business Laboratory, Tohoku University. From Jan . 2000 to Jan. 2002, he was a Postdoctoral Researcher with the Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands. From Mar. 2002 to Sep. 2011, he was a Researcher with the Advanced Technology Research and Development Center, Mitsubishi Electric Corporation, Japan. Since moved to Tottori University, Japan, in Oct. 2011, he had been an Endowed Chair Professor and has been a Professor with the Faculty of Engineering. His research interests include MEMS/NEMS, microfluidics, sensor, and semiconductor technology. He is an Associate Editor of IEEE Sensors Journal, and Micro and Nano Systems Letters.
Lunch will be provided for the registered in-person attendees.