Engineering the Next Semiconductor Paradigm
Modern semiconductor technology is increasingly limited not only by critical dimensions, but also by the rising complexity of 3D integration, heterogeneous materials, and fabrication-induced damage. Our group develops nanostructured semiconductor materials and devices by combining bottom-up MOCVD growth with top-down nanofabrication, with the goal of enabling device architectures that expand what is possible in electronics, photonics, quantum technologies, and emerging biomedical applications.
This talk will highlight two nanofabrication platforms we developed to address these scaling and integration challenges. First, I will present an unconventional anisotropic etching approach, metal-assisted chemical etching (MacEtch), that enables high-aspect-ratio semiconductor nanostructures with minimal process damage. I will discuss how MacEtch provides a versatile route to complex geometries and show representative devices including MacEtch-enabled β-Ga₂O₃ FinFETs and damage-free III-N microLED structures. Second, I will introduce our 3D self-rolled-up membrane (S-RuM) platform for extreme miniaturization of passive components, including inductors, transformers, and LC resonators for radio-frequency integrated circuits. I will describe the underlying mechanics, fabrication flow, and how 3D geometry can unlock performance and footprint advantages that are difficult to achieve with planar approaches. If time allows, I will close with recent directions in ferro-nitride (e.g. AlScN) MOCVD growth and device concepts that connect materials epitaxy to new device opportunities.
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- Conference room 4.03
- 60 Mills Rd, Acton
- Canberra, Australian Capital Territory
- Australia 2601
- Building: Research School of Physics, Building 160
- Room Number: Rm 4.03
Speakers
Xiuling
Engineering the Next Semiconductor Paradigm
Xiuling Li received her B.S. degree from Peking University and Ph.D. degree from the University of California at Los Angeles. Following post-doctoral positions at California Institute of Technology and University of Illinois, as well as industry experience at II-VI, Inc. (formerly EpiWorks, Inc.), she joined the faculty of the University of Illinois, Urbana-Champaign (UIUC) in 2007. At UIUC, she was the Donald Biggar Willett Professor in Engineering, the interim director of the Nick Holonyak Jr. Micro and Nanotechnology Laboratory, and the founding director of an NSF IUCRC center. She joined the faculty of the University of Texas at Austin in Aug. 2021. She holds the Truchard Foundation Endowed Chair in the Department of Electrical and Computer Engineering and serves as the founding co-director of the Texas Quantum Institute.
Her research focuses on semiconductor materials and devices. She has published >180 journal papers and holds >25 patents, delivered > 180 invited lectures worldwide. She has been honored with the NSF CAREER award, DARPA Young Faculty Award, and ONR Young Investigator Award, the IEEE Pioneer Award in Nanotechnology, and the IEEE Photonics Society Engineering Achievement award.
She is a Fellow of the IEEE, the American Physics Society (APS), the Optical Society (OSA), the National Academy of Inventors (NAI), and the American Association for the Advancement of Science (AAAS). Among her services to professional societies, she was the VP of Finance and Administration and an elected member of the board of governors of IEEE Photonics Society, IEEE Andrew Grove award committee chair, and the executive committee member of APS Division of Materials Physics. She has been a Deputy Editor of Applied Physics Letters since 2015.