Optical Sampling Thermoreflectance for 3D Heterogeneous Integration

#thermoreflectance #heterogeneous #integration #2.5D #3D #metrology

The transition to 3D heterogeneous integration has fundamentally changed the thermal characterization problem.  Buried heat sources, anisotropic thin-film materials, through-silicon vias, and multilayer stacked structures require measurement techniques with sub-micron spatial resolution, depth sensitivity, and a temporal range — capabilities that infrared thermography and Raman spectroscopy cannot reliably deliver at this level of structural complexity.  This session presents optical sampling thermoreflectance as a practical, commercially available solution, with real measurement data from a university lab and an industrial FA environment.