ADVANCED SEMICONDUCTOR TECHNOLOGY AND DEVICE ARCHITECTURES FOR THE NEXT DECADE
The micro and nanoelectronics device evolution towards fully integration in our daily life has been driven by Moore’s law, requiring the use of novel materials, the development of novel processing schemes and the switch toward novel design concepts and device architectures.
Semiconductors are everywhere, are essential to solve humanitarian challenges and are at the basis of innovative technologies such as AI. Device architectures such as FinFETs, TFETs, Gate-All-Around, nanowires (NWs), nanosheets (NSs), CFET and Forksheet structures for logic and analog/RF building blocks enable System-on-Chip (SoC) applications. The strong progress achieved in silicon technology and heterogenous integration of Ge and III-V technologies on a silicon platform results in the on-chip integration of building blocks with different functionality. In addition ,there is a commercial breakthrough of GaN devices, although dependent on the application competing with SiC . Major trends in process integration approaches are reviewed and technological challenges of some process modules and device structures highlighted.
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- acropolis institute of technology and research, Mangliya, Indore
- Indore, Madhya Pradesh
- India 452001
- Building: AITR
- Room Number: G-54
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