Fabrication of atomic-scale dopant-in-silicon quantum processors

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Fabrication of atomic-scale dopant-in-silicon for silicon quantum processors

Abstract:

Atomic-scale devices made from individual dopant atoms in silicon offer new ways to investigate physical phenomena and develop novel technologies.

At Asentas Quantum Systems (AQS), we are developing a solid-state quantum processor architecture in which the valence electron of a single dopant atom serves as a spin qubit and the nuclear spin of the same atom is used as a quantum memory. I will introduce this architecture and describe the fabrication technology that underpins it.

Our approach uses scanning tunneling microscopy hydrogen resist lithography (STM-HRL) to place individual dopant atoms deterministically with atomic-scale precision. Although STM-HRL is an established technique, the limited yield of single-atom fabrication has until recently been a major barrier scaling to large numbers of devices. I will show how we have overcome this limitation, achieving a single-atom yield approaching 100% for arsenic in silicon, providing a fabrication pathway to qubit scaling [1,2].

I will outline the full device fabrication process and present preliminary electrical measurements from arsenic-in-silicon devices fabricated using hydrogen resist lithography.

Finally, I will set out AQS’s vision for building a fault-tolerant quantum computer.

 

Read More:


Single-Atom Control of Arsenic Incorporation in Silicon for High-Yield Artificial Lattice Fabrication


Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy

 

 

 AGENDA:

Thursday November 12, 2026

11:30 AM: Networking, Pizza & Drinks

Noon -- 1 pm: Seminar

Please register on Eventbrite before 9:30 AM on Thursday November 12, 2026

$4 IEEE members  $6 non IEEE members

(discounts for unemployed and students )


  Date and Time

  Location

  Hosts

  Registration


  • Add_To_Calendar_icon Add Event to Calendar
  • EAG Labs
  • 810 Kifer Road
  • Sunnyvale, California, California
  • United States 95051
  • Building: ==> Use corner entrance: Kifer Road / San Lucar Court ==> Do not enter at main entrance on Kifer Road
  • Contact Event Host

  Speakers

 

Speaker:

Neil Curson

CEO of Asentas Quantum Systems (AQS)

Professor of Nanoelectronics and Nanofabrication at University College London (UCL)

Neil Curson is a leading expert in atomic-scale device fabrication. He has published more than 100 journal articles and has worked in experimental quantum computing since the infancy of the field, joining the Centre for Quantum Computing Technology in Australia in 2000.

His research interests center on understanding and controlling the behavior of atoms and molecules at surfaces and on developing and deploying new scanning probe lithography techniques, to fabricate of nanoscale electronic devices and atomic-scale components for quantum information processing.

Other areas of research include the microscopy, spectroscopy, and optical characterization of single dopants and dopant nanostructures in Group IV semiconductors and the study of spatial and temporal sources of decoherence in semiconductors and oxides.

He and two co-founders formed AQS in 2026, with the goal of using atomic-scale device fabrication to build a fault-tolerant quantum processor.

Neil Curson received his PhD from the University of Cambridge, UK.